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- W2513302223 endingPage "32" @default.
- W2513302223 startingPage "27" @default.
- W2513302223 created "2016-09-16" @default.
- W2513302223 creator A5008226170 @default.
- W2513302223 creator A5045804564 @default.
- W2513302223 date "1991-01-01" @default.
- W2513302223 modified "2023-09-25" @default.
- W2513302223 title "The Cleaning Technology Using the D.I. Water for SMT. The Cleaning Techniques of Silicon Wafers Using the D.I. Water for ULSI Fabrication Process." @default.
- W2513302223 doi "https://doi.org/10.5104/jiep1985.7.3_27" @default.
- W2513302223 hasPublicationYear "1991" @default.
- W2513302223 type Work @default.
- W2513302223 sameAs 2513302223 @default.
- W2513302223 citedByCount "0" @default.
- W2513302223 crossrefType "journal-article" @default.
- W2513302223 hasAuthorship W2513302223A5008226170 @default.
- W2513302223 hasAuthorship W2513302223A5045804564 @default.
- W2513302223 hasBestOaLocation W25133022231 @default.
- W2513302223 hasConcept C117671659 @default.
- W2513302223 hasConcept C127413603 @default.
- W2513302223 hasConcept C144133560 @default.
- W2513302223 hasConcept C21880701 @default.
- W2513302223 hasConcept C41008148 @default.
- W2513302223 hasConceptScore W2513302223C117671659 @default.
- W2513302223 hasConceptScore W2513302223C127413603 @default.
- W2513302223 hasConceptScore W2513302223C144133560 @default.
- W2513302223 hasConceptScore W2513302223C21880701 @default.
- W2513302223 hasConceptScore W2513302223C41008148 @default.
- W2513302223 hasIssue "3" @default.
- W2513302223 hasLocation W25133022231 @default.
- W2513302223 hasOpenAccess W2513302223 @default.
- W2513302223 hasPrimaryLocation W25133022231 @default.
- W2513302223 hasRelatedWork W2267140721 @default.
- W2513302223 hasRelatedWork W2381049233 @default.
- W2513302223 hasRelatedWork W2862352758 @default.
- W2513302223 hasRelatedWork W3039676499 @default.
- W2513302223 hasVolume "7" @default.
- W2513302223 isParatext "false" @default.
- W2513302223 isRetracted "false" @default.
- W2513302223 magId "2513302223" @default.
- W2513302223 workType "article" @default.