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- W2519177710 created "2016-09-23" @default.
- W2519177710 creator A5003290619 @default.
- W2519177710 creator A5004898377 @default.
- W2519177710 creator A5019183794 @default.
- W2519177710 creator A5027377077 @default.
- W2519177710 creator A5049204468 @default.
- W2519177710 creator A5080491807 @default.
- W2519177710 date "2016-10-12" @default.
- W2519177710 modified "2023-10-02" @default.
- W2519177710 title "Etching of Niobium in an Argon-Chlorine Capacitively Coupled Plasma" @default.
- W2519177710 hasPublicationYear "2016" @default.
- W2519177710 type Work @default.
- W2519177710 sameAs 2519177710 @default.
- W2519177710 citedByCount "0" @default.
- W2519177710 crossrefType "journal-article" @default.
- W2519177710 hasAuthorship W2519177710A5003290619 @default.
- W2519177710 hasAuthorship W2519177710A5004898377 @default.
- W2519177710 hasAuthorship W2519177710A5019183794 @default.
- W2519177710 hasAuthorship W2519177710A5027377077 @default.
- W2519177710 hasAuthorship W2519177710A5049204468 @default.
- W2519177710 hasAuthorship W2519177710A5080491807 @default.
- W2519177710 hasConcept C100460472 @default.
- W2519177710 hasConcept C107187091 @default.
- W2519177710 hasConcept C107872376 @default.
- W2519177710 hasConcept C113196181 @default.
- W2519177710 hasConcept C121332964 @default.
- W2519177710 hasConcept C171250308 @default.
- W2519177710 hasConcept C184779094 @default.
- W2519177710 hasConcept C185544564 @default.
- W2519177710 hasConcept C185592680 @default.
- W2519177710 hasConcept C191897082 @default.
- W2519177710 hasConcept C192562407 @default.
- W2519177710 hasConcept C2779227376 @default.
- W2519177710 hasConcept C505241676 @default.
- W2519177710 hasConcept C507968137 @default.
- W2519177710 hasConcept C547737533 @default.
- W2519177710 hasConcept C82706917 @default.
- W2519177710 hasConceptScore W2519177710C100460472 @default.
- W2519177710 hasConceptScore W2519177710C107187091 @default.
- W2519177710 hasConceptScore W2519177710C107872376 @default.
- W2519177710 hasConceptScore W2519177710C113196181 @default.
- W2519177710 hasConceptScore W2519177710C121332964 @default.
- W2519177710 hasConceptScore W2519177710C171250308 @default.
- W2519177710 hasConceptScore W2519177710C184779094 @default.
- W2519177710 hasConceptScore W2519177710C185544564 @default.
- W2519177710 hasConceptScore W2519177710C185592680 @default.
- W2519177710 hasConceptScore W2519177710C191897082 @default.
- W2519177710 hasConceptScore W2519177710C192562407 @default.
- W2519177710 hasConceptScore W2519177710C2779227376 @default.
- W2519177710 hasConceptScore W2519177710C505241676 @default.
- W2519177710 hasConceptScore W2519177710C507968137 @default.
- W2519177710 hasConceptScore W2519177710C547737533 @default.
- W2519177710 hasConceptScore W2519177710C82706917 @default.
- W2519177710 hasLocation W25191777101 @default.
- W2519177710 hasOpenAccess W2519177710 @default.
- W2519177710 hasPrimaryLocation W25191777101 @default.
- W2519177710 hasRelatedWork W154530572 @default.
- W2519177710 hasRelatedWork W1619276345 @default.
- W2519177710 hasRelatedWork W1980563574 @default.
- W2519177710 hasRelatedWork W2001626320 @default.
- W2519177710 hasRelatedWork W2022090380 @default.
- W2519177710 hasRelatedWork W2031201399 @default.
- W2519177710 hasRelatedWork W2074181023 @default.
- W2519177710 hasRelatedWork W2133007722 @default.
- W2519177710 hasRelatedWork W2150318936 @default.
- W2519177710 hasRelatedWork W2204302548 @default.
- W2519177710 hasRelatedWork W2242567428 @default.
- W2519177710 hasRelatedWork W2340333645 @default.
- W2519177710 hasRelatedWork W2538434591 @default.
- W2519177710 hasRelatedWork W264977084 @default.
- W2519177710 hasRelatedWork W2889458467 @default.
- W2519177710 hasRelatedWork W3028991659 @default.
- W2519177710 hasRelatedWork W3147445756 @default.
- W2519177710 hasRelatedWork W3151647830 @default.
- W2519177710 hasRelatedWork W2088706354 @default.
- W2519177710 hasRelatedWork W3126792187 @default.
- W2519177710 isParatext "false" @default.
- W2519177710 isRetracted "false" @default.
- W2519177710 magId "2519177710" @default.
- W2519177710 workType "article" @default.