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- W2522641010 endingPage "765" @default.
- W2522641010 startingPage "759" @default.
- W2522641010 created "2016-09-30" @default.
- W2522641010 creator A5018617418 @default.
- W2522641010 creator A5039847649 @default.
- W2522641010 creator A5041034055 @default.
- W2522641010 creator A5048424513 @default.
- W2522641010 creator A5057120881 @default.
- W2522641010 creator A5067040566 @default.
- W2522641010 creator A5083194625 @default.
- W2522641010 date "2003-01-01" @default.
- W2522641010 modified "2023-10-18" @default.
- W2522641010 title "Integration of ALD WCN into a dual damascene oxide module" @default.
- W2522641010 hasPublicationYear "2003" @default.
- W2522641010 type Work @default.
- W2522641010 sameAs 2522641010 @default.
- W2522641010 citedByCount "0" @default.
- W2522641010 crossrefType "journal-article" @default.
- W2522641010 hasAuthorship W2522641010A5018617418 @default.
- W2522641010 hasAuthorship W2522641010A5039847649 @default.
- W2522641010 hasAuthorship W2522641010A5041034055 @default.
- W2522641010 hasAuthorship W2522641010A5048424513 @default.
- W2522641010 hasAuthorship W2522641010A5057120881 @default.
- W2522641010 hasAuthorship W2522641010A5067040566 @default.
- W2522641010 hasAuthorship W2522641010A5083194625 @default.
- W2522641010 hasConcept C116372231 @default.
- W2522641010 hasConcept C124952713 @default.
- W2522641010 hasConcept C142362112 @default.
- W2522641010 hasConcept C191897082 @default.
- W2522641010 hasConcept C192562407 @default.
- W2522641010 hasConcept C2780980858 @default.
- W2522641010 hasConcept C41008148 @default.
- W2522641010 hasConcept C544778455 @default.
- W2522641010 hasConceptScore W2522641010C116372231 @default.
- W2522641010 hasConceptScore W2522641010C124952713 @default.
- W2522641010 hasConceptScore W2522641010C142362112 @default.
- W2522641010 hasConceptScore W2522641010C191897082 @default.
- W2522641010 hasConceptScore W2522641010C192562407 @default.
- W2522641010 hasConceptScore W2522641010C2780980858 @default.
- W2522641010 hasConceptScore W2522641010C41008148 @default.
- W2522641010 hasConceptScore W2522641010C544778455 @default.
- W2522641010 hasLocation W25226410101 @default.
- W2522641010 hasOpenAccess W2522641010 @default.
- W2522641010 hasPrimaryLocation W25226410101 @default.
- W2522641010 hasRelatedWork W1976606328 @default.
- W2522641010 hasRelatedWork W2087375634 @default.
- W2522641010 hasRelatedWork W2095270368 @default.
- W2522641010 hasRelatedWork W1506190926 @default.
- W2522641010 hasRelatedWork W1533350540 @default.
- W2522641010 hasRelatedWork W1620916336 @default.
- W2522641010 hasRelatedWork W1906969402 @default.
- W2522641010 hasRelatedWork W1927321751 @default.
- W2522641010 hasRelatedWork W1931324883 @default.
- W2522641010 hasRelatedWork W2097111107 @default.
- W2522641010 hasRelatedWork W2111998726 @default.
- W2522641010 hasRelatedWork W2113625107 @default.
- W2522641010 hasRelatedWork W2132788350 @default.
- W2522641010 hasRelatedWork W2133869502 @default.
- W2522641010 hasRelatedWork W2136419243 @default.
- W2522641010 hasRelatedWork W2138723770 @default.
- W2522641010 hasRelatedWork W2138935199 @default.
- W2522641010 hasRelatedWork W2148887372 @default.
- W2522641010 hasRelatedWork W2155459934 @default.
- W2522641010 hasRelatedWork W992039470 @default.
- W2522641010 isParatext "false" @default.
- W2522641010 isRetracted "false" @default.
- W2522641010 magId "2522641010" @default.
- W2522641010 workType "article" @default.