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- W2523199672 created "2016-09-30" @default.
- W2523199672 creator A5006445732 @default.
- W2523199672 creator A5011557534 @default.
- W2523199672 creator A5014471747 @default.
- W2523199672 creator A5020108967 @default.
- W2523199672 creator A5023792818 @default.
- W2523199672 creator A5040011398 @default.
- W2523199672 creator A5067028141 @default.
- W2523199672 date "2012-10-25" @default.
- W2523199672 modified "2023-09-27" @default.
- W2523199672 title "Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)" @default.
- W2523199672 hasPublicationYear "2012" @default.
- W2523199672 type Work @default.
- W2523199672 sameAs 2523199672 @default.
- W2523199672 citedByCount "0" @default.
- W2523199672 crossrefType "journal-article" @default.
- W2523199672 hasAuthorship W2523199672A5006445732 @default.
- W2523199672 hasAuthorship W2523199672A5011557534 @default.
- W2523199672 hasAuthorship W2523199672A5014471747 @default.
- W2523199672 hasAuthorship W2523199672A5020108967 @default.
- W2523199672 hasAuthorship W2523199672A5023792818 @default.
- W2523199672 hasAuthorship W2523199672A5040011398 @default.
- W2523199672 hasAuthorship W2523199672A5067028141 @default.
- W2523199672 hasConcept C121332964 @default.
- W2523199672 hasConcept C185544564 @default.
- W2523199672 hasConcept C192562407 @default.
- W2523199672 hasConcept C26873012 @default.
- W2523199672 hasConcept C42704618 @default.
- W2523199672 hasConcept C82706917 @default.
- W2523199672 hasConcept C97355855 @default.
- W2523199672 hasConceptScore W2523199672C121332964 @default.
- W2523199672 hasConceptScore W2523199672C185544564 @default.
- W2523199672 hasConceptScore W2523199672C192562407 @default.
- W2523199672 hasConceptScore W2523199672C26873012 @default.
- W2523199672 hasConceptScore W2523199672C42704618 @default.
- W2523199672 hasConceptScore W2523199672C82706917 @default.
- W2523199672 hasConceptScore W2523199672C97355855 @default.
- W2523199672 hasLocation W25231996721 @default.
- W2523199672 hasOpenAccess W2523199672 @default.
- W2523199672 hasPrimaryLocation W25231996721 @default.
- W2523199672 hasRelatedWork W1982918088 @default.
- W2523199672 hasRelatedWork W2021006308 @default.
- W2523199672 isParatext "false" @default.
- W2523199672 isRetracted "false" @default.
- W2523199672 magId "2523199672" @default.
- W2523199672 workType "article" @default.