Matches in SemOpenAlex for { <https://semopenalex.org/work/W2525965087> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2525965087 endingPage "446" @default.
- W2525965087 startingPage "436" @default.
- W2525965087 created "2016-10-07" @default.
- W2525965087 creator A5005203021 @default.
- W2525965087 creator A5020869509 @default.
- W2525965087 creator A5026332236 @default.
- W2525965087 creator A5027487134 @default.
- W2525965087 creator A5027970493 @default.
- W2525965087 creator A5030807663 @default.
- W2525965087 creator A5033045118 @default.
- W2525965087 creator A5033966941 @default.
- W2525965087 creator A5034373550 @default.
- W2525965087 creator A5044486582 @default.
- W2525965087 creator A5049677367 @default.
- W2525965087 creator A5053777799 @default.
- W2525965087 creator A5056576628 @default.
- W2525965087 creator A5058347261 @default.
- W2525965087 creator A5058435891 @default.
- W2525965087 creator A5061145610 @default.
- W2525965087 creator A5066530245 @default.
- W2525965087 creator A5070034004 @default.
- W2525965087 creator A5080161336 @default.
- W2525965087 creator A5084270989 @default.
- W2525965087 creator A5087201919 @default.
- W2525965087 date "2008-01-01" @default.
- W2525965087 modified "2023-09-28" @default.
- W2525965087 title "Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions" @default.
- W2525965087 hasPublicationYear "2008" @default.
- W2525965087 type Work @default.
- W2525965087 sameAs 2525965087 @default.
- W2525965087 citedByCount "0" @default.
- W2525965087 crossrefType "journal-article" @default.
- W2525965087 hasAuthorship W2525965087A5005203021 @default.
- W2525965087 hasAuthorship W2525965087A5020869509 @default.
- W2525965087 hasAuthorship W2525965087A5026332236 @default.
- W2525965087 hasAuthorship W2525965087A5027487134 @default.
- W2525965087 hasAuthorship W2525965087A5027970493 @default.
- W2525965087 hasAuthorship W2525965087A5030807663 @default.
- W2525965087 hasAuthorship W2525965087A5033045118 @default.
- W2525965087 hasAuthorship W2525965087A5033966941 @default.
- W2525965087 hasAuthorship W2525965087A5034373550 @default.
- W2525965087 hasAuthorship W2525965087A5044486582 @default.
- W2525965087 hasAuthorship W2525965087A5049677367 @default.
- W2525965087 hasAuthorship W2525965087A5053777799 @default.
- W2525965087 hasAuthorship W2525965087A5056576628 @default.
- W2525965087 hasAuthorship W2525965087A5058347261 @default.
- W2525965087 hasAuthorship W2525965087A5058435891 @default.
- W2525965087 hasAuthorship W2525965087A5061145610 @default.
- W2525965087 hasAuthorship W2525965087A5066530245 @default.
- W2525965087 hasAuthorship W2525965087A5070034004 @default.
- W2525965087 hasAuthorship W2525965087A5080161336 @default.
- W2525965087 hasAuthorship W2525965087A5084270989 @default.
- W2525965087 hasAuthorship W2525965087A5087201919 @default.
- W2525965087 hasConcept C127413603 @default.
- W2525965087 hasConcept C21880701 @default.
- W2525965087 hasConcept C39432304 @default.
- W2525965087 hasConcept C41008148 @default.
- W2525965087 hasConceptScore W2525965087C127413603 @default.
- W2525965087 hasConceptScore W2525965087C21880701 @default.
- W2525965087 hasConceptScore W2525965087C39432304 @default.
- W2525965087 hasConceptScore W2525965087C41008148 @default.
- W2525965087 hasLocation W25259650871 @default.
- W2525965087 hasOpenAccess W2525965087 @default.
- W2525965087 hasPrimaryLocation W25259650871 @default.
- W2525965087 hasRelatedWork W2008411613 @default.
- W2525965087 hasRelatedWork W2011517528 @default.
- W2525965087 hasRelatedWork W2108641113 @default.
- W2525965087 hasRelatedWork W2147229891 @default.
- W2525965087 hasRelatedWork W2793120106 @default.
- W2525965087 hasRelatedWork W2819059351 @default.
- W2525965087 hasRelatedWork W2838095566 @default.
- W2525965087 isParatext "false" @default.
- W2525965087 isRetracted "false" @default.
- W2525965087 magId "2525965087" @default.
- W2525965087 workType "article" @default.