Matches in SemOpenAlex for { <https://semopenalex.org/work/W2526260992> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2526260992 created "2016-10-07" @default.
- W2526260992 creator A5002485384 @default.
- W2526260992 creator A5009449922 @default.
- W2526260992 creator A5010083742 @default.
- W2526260992 creator A5010984513 @default.
- W2526260992 creator A5030618103 @default.
- W2526260992 creator A5033966941 @default.
- W2526260992 creator A5034401397 @default.
- W2526260992 creator A5035980017 @default.
- W2526260992 creator A5041801029 @default.
- W2526260992 creator A5055077520 @default.
- W2526260992 creator A5056576628 @default.
- W2526260992 creator A5064307108 @default.
- W2526260992 creator A5087201919 @default.
- W2526260992 creator A5089234603 @default.
- W2526260992 date "2015-01-01" @default.
- W2526260992 modified "2023-09-23" @default.
- W2526260992 title "Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance" @default.
- W2526260992 hasPublicationYear "2015" @default.
- W2526260992 type Work @default.
- W2526260992 sameAs 2526260992 @default.
- W2526260992 citedByCount "0" @default.
- W2526260992 crossrefType "journal-article" @default.
- W2526260992 hasAuthorship W2526260992A5002485384 @default.
- W2526260992 hasAuthorship W2526260992A5009449922 @default.
- W2526260992 hasAuthorship W2526260992A5010083742 @default.
- W2526260992 hasAuthorship W2526260992A5010984513 @default.
- W2526260992 hasAuthorship W2526260992A5030618103 @default.
- W2526260992 hasAuthorship W2526260992A5033966941 @default.
- W2526260992 hasAuthorship W2526260992A5034401397 @default.
- W2526260992 hasAuthorship W2526260992A5035980017 @default.
- W2526260992 hasAuthorship W2526260992A5041801029 @default.
- W2526260992 hasAuthorship W2526260992A5055077520 @default.
- W2526260992 hasAuthorship W2526260992A5056576628 @default.
- W2526260992 hasAuthorship W2526260992A5064307108 @default.
- W2526260992 hasAuthorship W2526260992A5087201919 @default.
- W2526260992 hasAuthorship W2526260992A5089234603 @default.
- W2526260992 hasConcept C111919701 @default.
- W2526260992 hasConcept C121332964 @default.
- W2526260992 hasConcept C178790620 @default.
- W2526260992 hasConcept C185592680 @default.
- W2526260992 hasConcept C18903297 @default.
- W2526260992 hasConcept C2777822432 @default.
- W2526260992 hasConcept C2779530757 @default.
- W2526260992 hasConcept C2780797713 @default.
- W2526260992 hasConcept C39432304 @default.
- W2526260992 hasConcept C41008148 @default.
- W2526260992 hasConcept C62520636 @default.
- W2526260992 hasConcept C86803240 @default.
- W2526260992 hasConcept C98045186 @default.
- W2526260992 hasConceptScore W2526260992C111919701 @default.
- W2526260992 hasConceptScore W2526260992C121332964 @default.
- W2526260992 hasConceptScore W2526260992C178790620 @default.
- W2526260992 hasConceptScore W2526260992C185592680 @default.
- W2526260992 hasConceptScore W2526260992C18903297 @default.
- W2526260992 hasConceptScore W2526260992C2777822432 @default.
- W2526260992 hasConceptScore W2526260992C2779530757 @default.
- W2526260992 hasConceptScore W2526260992C2780797713 @default.
- W2526260992 hasConceptScore W2526260992C39432304 @default.
- W2526260992 hasConceptScore W2526260992C41008148 @default.
- W2526260992 hasConceptScore W2526260992C62520636 @default.
- W2526260992 hasConceptScore W2526260992C86803240 @default.
- W2526260992 hasConceptScore W2526260992C98045186 @default.
- W2526260992 hasLocation W25262609921 @default.
- W2526260992 hasOpenAccess W2526260992 @default.
- W2526260992 hasPrimaryLocation W25262609921 @default.
- W2526260992 isParatext "false" @default.
- W2526260992 isRetracted "false" @default.
- W2526260992 magId "2526260992" @default.
- W2526260992 workType "article" @default.