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- W2530735821 created "2016-10-21" @default.
- W2530735821 creator A5074065361 @default.
- W2530735821 date "1991-05-01" @default.
- W2530735821 modified "2023-09-23" @default.
- W2530735821 title "High-precision masks for submicron lithography" @default.
- W2530735821 hasPublicationYear "1991" @default.
- W2530735821 type Work @default.
- W2530735821 sameAs 2530735821 @default.
- W2530735821 citedByCount "0" @default.
- W2530735821 crossrefType "journal-article" @default.
- W2530735821 hasAuthorship W2530735821A5074065361 @default.
- W2530735821 hasConcept C120665830 @default.
- W2530735821 hasConcept C121332964 @default.
- W2530735821 hasConcept C192562407 @default.
- W2530735821 hasConcept C204223013 @default.
- W2530735821 hasConcept C41008148 @default.
- W2530735821 hasConcept C49040817 @default.
- W2530735821 hasConceptScore W2530735821C120665830 @default.
- W2530735821 hasConceptScore W2530735821C121332964 @default.
- W2530735821 hasConceptScore W2530735821C192562407 @default.
- W2530735821 hasConceptScore W2530735821C204223013 @default.
- W2530735821 hasConceptScore W2530735821C41008148 @default.
- W2530735821 hasConceptScore W2530735821C49040817 @default.
- W2530735821 hasLocation W25307358211 @default.
- W2530735821 hasOpenAccess W2530735821 @default.
- W2530735821 hasPrimaryLocation W25307358211 @default.
- W2530735821 hasRelatedWork W2083461846 @default.
- W2530735821 hasRelatedWork W2791183653 @default.
- W2530735821 hasRelatedWork W2911554158 @default.
- W2530735821 hasRelatedWork W3058382440 @default.
- W2530735821 hasRelatedWork W3144035318 @default.
- W2530735821 hasRelatedWork W2418364529 @default.
- W2530735821 hasRelatedWork W2735970705 @default.
- W2530735821 hasRelatedWork W2746506921 @default.
- W2530735821 hasRelatedWork W2788656524 @default.
- W2530735821 hasRelatedWork W2823969377 @default.
- W2530735821 hasRelatedWork W2828727990 @default.
- W2530735821 hasRelatedWork W2831904611 @default.
- W2530735821 hasRelatedWork W2841010242 @default.
- W2530735821 hasRelatedWork W2849950798 @default.
- W2530735821 hasRelatedWork W2853870770 @default.
- W2530735821 hasRelatedWork W2862856357 @default.
- W2530735821 hasRelatedWork W3141157327 @default.
- W2530735821 hasRelatedWork W3145130709 @default.
- W2530735821 hasRelatedWork W3145218145 @default.
- W2530735821 hasRelatedWork W3201898105 @default.
- W2530735821 isParatext "false" @default.
- W2530735821 isRetracted "false" @default.
- W2530735821 magId "2530735821" @default.
- W2530735821 workType "article" @default.