Matches in SemOpenAlex for { <https://semopenalex.org/work/W2578899720> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W2578899720 startingPage "8" @default.
- W2578899720 created "2017-01-26" @default.
- W2578899720 creator A5073351150 @default.
- W2578899720 date "1990-01-01" @default.
- W2578899720 modified "2023-09-24" @default.
- W2578899720 title "Reactive Ion Etching of Silicon Dioxide Using Both Oxygen and Carbon Dioxide as Gas Additives" @default.
- W2578899720 hasPublicationYear "1990" @default.
- W2578899720 type Work @default.
- W2578899720 sameAs 2578899720 @default.
- W2578899720 citedByCount "0" @default.
- W2578899720 crossrefType "journal-article" @default.
- W2578899720 hasAuthorship W2578899720A5073351150 @default.
- W2578899720 hasConcept C100460472 @default.
- W2578899720 hasConcept C130472188 @default.
- W2578899720 hasConcept C130622031 @default.
- W2578899720 hasConcept C171250308 @default.
- W2578899720 hasConcept C178790620 @default.
- W2578899720 hasConcept C179104552 @default.
- W2578899720 hasConcept C185592680 @default.
- W2578899720 hasConcept C191897082 @default.
- W2578899720 hasConcept C192562407 @default.
- W2578899720 hasConcept C22884784 @default.
- W2578899720 hasConcept C2779089622 @default.
- W2578899720 hasConcept C2779227376 @default.
- W2578899720 hasConcept C530467964 @default.
- W2578899720 hasConcept C540031477 @default.
- W2578899720 hasConceptScore W2578899720C100460472 @default.
- W2578899720 hasConceptScore W2578899720C130472188 @default.
- W2578899720 hasConceptScore W2578899720C130622031 @default.
- W2578899720 hasConceptScore W2578899720C171250308 @default.
- W2578899720 hasConceptScore W2578899720C178790620 @default.
- W2578899720 hasConceptScore W2578899720C179104552 @default.
- W2578899720 hasConceptScore W2578899720C185592680 @default.
- W2578899720 hasConceptScore W2578899720C191897082 @default.
- W2578899720 hasConceptScore W2578899720C192562407 @default.
- W2578899720 hasConceptScore W2578899720C22884784 @default.
- W2578899720 hasConceptScore W2578899720C2779089622 @default.
- W2578899720 hasConceptScore W2578899720C2779227376 @default.
- W2578899720 hasConceptScore W2578899720C530467964 @default.
- W2578899720 hasConceptScore W2578899720C540031477 @default.
- W2578899720 hasIssue "1" @default.
- W2578899720 hasLocation W25788997201 @default.
- W2578899720 hasOpenAccess W2578899720 @default.
- W2578899720 hasPrimaryLocation W25788997201 @default.
- W2578899720 hasRelatedWork W2083953448 @default.
- W2578899720 hasRelatedWork W2089613798 @default.
- W2578899720 hasRelatedWork W2330665804 @default.
- W2578899720 hasRelatedWork W2335487640 @default.
- W2578899720 hasRelatedWork W2343131823 @default.
- W2578899720 hasRelatedWork W2583238377 @default.
- W2578899720 hasRelatedWork W2996302709 @default.
- W2578899720 hasRelatedWork W3012372498 @default.
- W2578899720 hasRelatedWork W3208173534 @default.
- W2578899720 hasRelatedWork W380689653 @default.
- W2578899720 hasRelatedWork W1980437891 @default.
- W2578899720 hasRelatedWork W2079953778 @default.
- W2578899720 hasRelatedWork W2510214131 @default.
- W2578899720 hasRelatedWork W2774147921 @default.
- W2578899720 hasRelatedWork W2828520769 @default.
- W2578899720 hasRelatedWork W2839398944 @default.
- W2578899720 hasRelatedWork W2840498350 @default.
- W2578899720 hasRelatedWork W2868695093 @default.
- W2578899720 hasRelatedWork W2882181734 @default.
- W2578899720 hasRelatedWork W3084635061 @default.
- W2578899720 hasVolume "4" @default.
- W2578899720 isParatext "false" @default.
- W2578899720 isRetracted "false" @default.
- W2578899720 magId "2578899720" @default.
- W2578899720 workType "article" @default.