Matches in SemOpenAlex for { <https://semopenalex.org/work/W2578989085> ?p ?o ?g. }
Showing items 1 to 50 of
50
with 100 items per page.
- W2578989085 created "2017-01-26" @default.
- W2578989085 creator A5059518695 @default.
- W2578989085 date "2013-01-01" @default.
- W2578989085 modified "2023-09-28" @default.
- W2578989085 title "Investigation of the reflectivity uniformity for EUV lithography" @default.
- W2578989085 hasPublicationYear "2013" @default.
- W2578989085 type Work @default.
- W2578989085 sameAs 2578989085 @default.
- W2578989085 citedByCount "0" @default.
- W2578989085 crossrefType "journal-article" @default.
- W2578989085 hasAuthorship W2578989085A5059518695 @default.
- W2578989085 hasConcept C108597893 @default.
- W2578989085 hasConcept C120665830 @default.
- W2578989085 hasConcept C121332964 @default.
- W2578989085 hasConcept C162996421 @default.
- W2578989085 hasConcept C192562407 @default.
- W2578989085 hasConcept C204223013 @default.
- W2578989085 hasConceptScore W2578989085C108597893 @default.
- W2578989085 hasConceptScore W2578989085C120665830 @default.
- W2578989085 hasConceptScore W2578989085C121332964 @default.
- W2578989085 hasConceptScore W2578989085C162996421 @default.
- W2578989085 hasConceptScore W2578989085C192562407 @default.
- W2578989085 hasConceptScore W2578989085C204223013 @default.
- W2578989085 hasLocation W25789890851 @default.
- W2578989085 hasOpenAccess W2578989085 @default.
- W2578989085 hasPrimaryLocation W25789890851 @default.
- W2578989085 hasRelatedWork W1986954108 @default.
- W2578989085 hasRelatedWork W2012324866 @default.
- W2578989085 hasRelatedWork W2073837454 @default.
- W2578989085 hasRelatedWork W2079401957 @default.
- W2578989085 hasRelatedWork W2325816927 @default.
- W2578989085 hasRelatedWork W2331086033 @default.
- W2578989085 hasRelatedWork W2526802901 @default.
- W2578989085 hasRelatedWork W2546499006 @default.
- W2578989085 hasRelatedWork W2551936428 @default.
- W2578989085 hasRelatedWork W2914595912 @default.
- W2578989085 hasRelatedWork W2969175618 @default.
- W2578989085 hasRelatedWork W2993321506 @default.
- W2578989085 hasRelatedWork W3103978859 @default.
- W2578989085 hasRelatedWork W2586480598 @default.
- W2578989085 hasRelatedWork W2745311863 @default.
- W2578989085 hasRelatedWork W2852512233 @default.
- W2578989085 hasRelatedWork W2852688199 @default.
- W2578989085 hasRelatedWork W2853264836 @default.
- W2578989085 hasRelatedWork W2924674742 @default.
- W2578989085 hasRelatedWork W2964495730 @default.
- W2578989085 isParatext "false" @default.
- W2578989085 isRetracted "false" @default.
- W2578989085 magId "2578989085" @default.
- W2578989085 workType "article" @default.