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- W2588677529 created "2017-02-24" @default.
- W2588677529 creator A5008907254 @default.
- W2588677529 creator A5077342553 @default.
- W2588677529 date "2013-01-01" @default.
- W2588677529 modified "2023-09-25" @default.
- W2588677529 title "Plasma-assisted atomic layer deposition of PtOx in high aspect ratio trenches" @default.
- W2588677529 hasPublicationYear "2013" @default.
- W2588677529 type Work @default.
- W2588677529 sameAs 2588677529 @default.
- W2588677529 citedByCount "0" @default.
- W2588677529 crossrefType "journal-article" @default.
- W2588677529 hasAuthorship W2588677529A5008907254 @default.
- W2588677529 hasAuthorship W2588677529A5077342553 @default.
- W2588677529 hasConcept C121332964 @default.
- W2588677529 hasConcept C127313418 @default.
- W2588677529 hasConcept C151730666 @default.
- W2588677529 hasConcept C171250308 @default.
- W2588677529 hasConcept C185544564 @default.
- W2588677529 hasConcept C192562407 @default.
- W2588677529 hasConcept C2779227376 @default.
- W2588677529 hasConcept C2816523 @default.
- W2588677529 hasConcept C64297162 @default.
- W2588677529 hasConcept C69544855 @default.
- W2588677529 hasConcept C82706917 @default.
- W2588677529 hasConceptScore W2588677529C121332964 @default.
- W2588677529 hasConceptScore W2588677529C127313418 @default.
- W2588677529 hasConceptScore W2588677529C151730666 @default.
- W2588677529 hasConceptScore W2588677529C171250308 @default.
- W2588677529 hasConceptScore W2588677529C185544564 @default.
- W2588677529 hasConceptScore W2588677529C192562407 @default.
- W2588677529 hasConceptScore W2588677529C2779227376 @default.
- W2588677529 hasConceptScore W2588677529C2816523 @default.
- W2588677529 hasConceptScore W2588677529C64297162 @default.
- W2588677529 hasConceptScore W2588677529C69544855 @default.
- W2588677529 hasConceptScore W2588677529C82706917 @default.
- W2588677529 hasLocation W25886775291 @default.
- W2588677529 hasOpenAccess W2588677529 @default.
- W2588677529 hasPrimaryLocation W25886775291 @default.
- W2588677529 hasRelatedWork W1977686863 @default.
- W2588677529 hasRelatedWork W1993751284 @default.
- W2588677529 hasRelatedWork W2081656711 @default.
- W2588677529 hasRelatedWork W2088077663 @default.
- W2588677529 hasRelatedWork W2250160784 @default.
- W2588677529 hasRelatedWork W2356621652 @default.
- W2588677529 hasRelatedWork W2529131770 @default.
- W2588677529 hasRelatedWork W2562351986 @default.
- W2588677529 hasRelatedWork W2600470417 @default.
- W2588677529 hasRelatedWork W2786763611 @default.
- W2588677529 hasRelatedWork W2793122742 @default.
- W2588677529 hasRelatedWork W2905138849 @default.
- W2588677529 hasRelatedWork W2913309640 @default.
- W2588677529 hasRelatedWork W2950191174 @default.
- W2588677529 hasRelatedWork W2969944753 @default.
- W2588677529 hasRelatedWork W3014637810 @default.
- W2588677529 hasRelatedWork W3153038898 @default.
- W2588677529 hasRelatedWork W2587536585 @default.
- W2588677529 hasRelatedWork W2869251413 @default.
- W2588677529 hasRelatedWork W2869432930 @default.
- W2588677529 isParatext "false" @default.
- W2588677529 isRetracted "false" @default.
- W2588677529 magId "2588677529" @default.
- W2588677529 workType "article" @default.