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- W2589606514 endingPage "1" @default.
- W2589606514 startingPage "1" @default.
- W2589606514 created "2017-03-03" @default.
- W2589606514 creator A5000465847 @default.
- W2589606514 creator A5001661787 @default.
- W2589606514 creator A5010856120 @default.
- W2589606514 creator A5051148994 @default.
- W2589606514 creator A5063395559 @default.
- W2589606514 creator A5064307108 @default.
- W2589606514 creator A5064482977 @default.
- W2589606514 date "2016-01-01" @default.
- W2589606514 modified "2023-09-27" @default.
- W2589606514 title "Templated DSA with EUV-exposed pre-patterns" @default.
- W2589606514 hasPublicationYear "2016" @default.
- W2589606514 type Work @default.
- W2589606514 sameAs 2589606514 @default.
- W2589606514 citedByCount "0" @default.
- W2589606514 crossrefType "journal-article" @default.
- W2589606514 hasAuthorship W2589606514A5000465847 @default.
- W2589606514 hasAuthorship W2589606514A5001661787 @default.
- W2589606514 hasAuthorship W2589606514A5010856120 @default.
- W2589606514 hasAuthorship W2589606514A5051148994 @default.
- W2589606514 hasAuthorship W2589606514A5063395559 @default.
- W2589606514 hasAuthorship W2589606514A5064307108 @default.
- W2589606514 hasAuthorship W2589606514A5064482977 @default.
- W2589606514 hasConcept C120665830 @default.
- W2589606514 hasConcept C121332964 @default.
- W2589606514 hasConcept C162996421 @default.
- W2589606514 hasConcept C41008148 @default.
- W2589606514 hasConceptScore W2589606514C120665830 @default.
- W2589606514 hasConceptScore W2589606514C121332964 @default.
- W2589606514 hasConceptScore W2589606514C162996421 @default.
- W2589606514 hasConceptScore W2589606514C41008148 @default.
- W2589606514 hasLocation W25896065141 @default.
- W2589606514 hasOpenAccess W2589606514 @default.
- W2589606514 hasPrimaryLocation W25896065141 @default.
- W2589606514 isParatext "false" @default.
- W2589606514 isRetracted "false" @default.
- W2589606514 magId "2589606514" @default.
- W2589606514 workType "article" @default.