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- W2604348086 created "2017-04-14" @default.
- W2604348086 creator A5021076384 @default.
- W2604348086 creator A5051532011 @default.
- W2604348086 creator A5076376190 @default.
- W2604348086 date "1994-01-01" @default.
- W2604348086 modified "2023-10-18" @default.
- W2604348086 title "Interlevel dielectric planarization to optical tolerances using chemical-mechanical polishing in the fabrication of spatial light modulator backplanes" @default.
- W2604348086 hasPublicationYear "1994" @default.
- W2604348086 type Work @default.
- W2604348086 sameAs 2604348086 @default.
- W2604348086 citedByCount "0" @default.
- W2604348086 crossrefType "journal-article" @default.
- W2604348086 hasAuthorship W2604348086A5021076384 @default.
- W2604348086 hasAuthorship W2604348086A5051532011 @default.
- W2604348086 hasAuthorship W2604348086A5076376190 @default.
- W2604348086 hasConcept C119599485 @default.
- W2604348086 hasConcept C120665830 @default.
- W2604348086 hasConcept C121332964 @default.
- W2604348086 hasConcept C127413603 @default.
- W2604348086 hasConcept C133386390 @default.
- W2604348086 hasConcept C134256836 @default.
- W2604348086 hasConcept C136525101 @default.
- W2604348086 hasConcept C138113353 @default.
- W2604348086 hasConcept C142724271 @default.
- W2604348086 hasConcept C159985019 @default.
- W2604348086 hasConcept C180088628 @default.
- W2604348086 hasConcept C192562407 @default.
- W2604348086 hasConcept C204787440 @default.
- W2604348086 hasConcept C2777903624 @default.
- W2604348086 hasConcept C49040817 @default.
- W2604348086 hasConcept C71924100 @default.
- W2604348086 hasConceptScore W2604348086C119599485 @default.
- W2604348086 hasConceptScore W2604348086C120665830 @default.
- W2604348086 hasConceptScore W2604348086C121332964 @default.
- W2604348086 hasConceptScore W2604348086C127413603 @default.
- W2604348086 hasConceptScore W2604348086C133386390 @default.
- W2604348086 hasConceptScore W2604348086C134256836 @default.
- W2604348086 hasConceptScore W2604348086C136525101 @default.
- W2604348086 hasConceptScore W2604348086C138113353 @default.
- W2604348086 hasConceptScore W2604348086C142724271 @default.
- W2604348086 hasConceptScore W2604348086C159985019 @default.
- W2604348086 hasConceptScore W2604348086C180088628 @default.
- W2604348086 hasConceptScore W2604348086C192562407 @default.
- W2604348086 hasConceptScore W2604348086C204787440 @default.
- W2604348086 hasConceptScore W2604348086C2777903624 @default.
- W2604348086 hasConceptScore W2604348086C49040817 @default.
- W2604348086 hasConceptScore W2604348086C71924100 @default.
- W2604348086 hasLocation W26043480861 @default.
- W2604348086 hasOpenAccess W2604348086 @default.
- W2604348086 hasPrimaryLocation W26043480861 @default.
- W2604348086 hasRelatedWork W1570710996 @default.
- W2604348086 hasRelatedWork W1880267489 @default.
- W2604348086 hasRelatedWork W2005474516 @default.
- W2604348086 hasRelatedWork W2061849931 @default.
- W2604348086 hasRelatedWork W2067410799 @default.
- W2604348086 hasRelatedWork W2099318110 @default.
- W2604348086 hasRelatedWork W2158894130 @default.
- W2604348086 hasRelatedWork W2537047176 @default.
- W2604348086 hasRelatedWork W2605714426 @default.
- W2604348086 hasRelatedWork W2766104349 @default.
- W2604348086 hasRelatedWork W3028399389 @default.
- W2604348086 hasRelatedWork W72561309 @default.
- W2604348086 hasRelatedWork W74903192 @default.
- W2604348086 hasRelatedWork W204316934 @default.
- W2604348086 hasRelatedWork W2139628000 @default.
- W2604348086 hasRelatedWork W2836110913 @default.
- W2604348086 hasRelatedWork W2836371380 @default.
- W2604348086 hasRelatedWork W2846489113 @default.
- W2604348086 hasRelatedWork W2851248345 @default.
- W2604348086 hasRelatedWork W2937566627 @default.
- W2604348086 isParatext "false" @default.
- W2604348086 isRetracted "false" @default.
- W2604348086 magId "2604348086" @default.
- W2604348086 workType "article" @default.