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- W2604661742 created "2017-04-14" @default.
- W2604661742 creator A5065716392 @default.
- W2604661742 date "2015-07-17" @default.
- W2604661742 modified "2023-09-26" @default.
- W2604661742 title "Substrate temperature dependence of ALD alumina film using oxygen plasma" @default.
- W2604661742 hasPublicationYear "2015" @default.
- W2604661742 type Work @default.
- W2604661742 sameAs 2604661742 @default.
- W2604661742 citedByCount "0" @default.
- W2604661742 crossrefType "journal-article" @default.
- W2604661742 hasAuthorship W2604661742A5065716392 @default.
- W2604661742 hasConcept C111368507 @default.
- W2604661742 hasConcept C121332964 @default.
- W2604661742 hasConcept C127313418 @default.
- W2604661742 hasConcept C127413603 @default.
- W2604661742 hasConcept C171250308 @default.
- W2604661742 hasConcept C178790620 @default.
- W2604661742 hasConcept C185592680 @default.
- W2604661742 hasConcept C192562407 @default.
- W2604661742 hasConcept C2777289219 @default.
- W2604661742 hasConcept C42360764 @default.
- W2604661742 hasConcept C540031477 @default.
- W2604661742 hasConcept C62520636 @default.
- W2604661742 hasConcept C82706917 @default.
- W2604661742 hasConceptScore W2604661742C111368507 @default.
- W2604661742 hasConceptScore W2604661742C121332964 @default.
- W2604661742 hasConceptScore W2604661742C127313418 @default.
- W2604661742 hasConceptScore W2604661742C127413603 @default.
- W2604661742 hasConceptScore W2604661742C171250308 @default.
- W2604661742 hasConceptScore W2604661742C178790620 @default.
- W2604661742 hasConceptScore W2604661742C185592680 @default.
- W2604661742 hasConceptScore W2604661742C192562407 @default.
- W2604661742 hasConceptScore W2604661742C2777289219 @default.
- W2604661742 hasConceptScore W2604661742C42360764 @default.
- W2604661742 hasConceptScore W2604661742C540031477 @default.
- W2604661742 hasConceptScore W2604661742C62520636 @default.
- W2604661742 hasConceptScore W2604661742C82706917 @default.
- W2604661742 hasLocation W26046617421 @default.
- W2604661742 hasOpenAccess W2604661742 @default.
- W2604661742 hasPrimaryLocation W26046617421 @default.
- W2604661742 hasRelatedWork W1579193438 @default.
- W2604661742 hasRelatedWork W1964480799 @default.
- W2604661742 hasRelatedWork W1983999982 @default.
- W2604661742 hasRelatedWork W2001755561 @default.
- W2604661742 hasRelatedWork W2005392027 @default.
- W2604661742 hasRelatedWork W2020729336 @default.
- W2604661742 hasRelatedWork W2061089059 @default.
- W2604661742 hasRelatedWork W2092746093 @default.
- W2604661742 hasRelatedWork W2118250331 @default.
- W2604661742 hasRelatedWork W2330798936 @default.
- W2604661742 hasRelatedWork W2395854906 @default.
- W2604661742 hasRelatedWork W2506801765 @default.
- W2604661742 hasRelatedWork W2783413511 @default.
- W2604661742 hasRelatedWork W2890707272 @default.
- W2604661742 hasRelatedWork W2906391743 @default.
- W2604661742 hasRelatedWork W2971546342 @default.
- W2604661742 hasRelatedWork W2995611241 @default.
- W2604661742 hasRelatedWork W2997784783 @default.
- W2604661742 hasRelatedWork W3157506534 @default.
- W2604661742 hasRelatedWork W761288034 @default.
- W2604661742 isParatext "false" @default.
- W2604661742 isRetracted "false" @default.
- W2604661742 magId "2604661742" @default.
- W2604661742 workType "article" @default.