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- W2624233223 created "2017-06-15" @default.
- W2624233223 creator A5005447138 @default.
- W2624233223 creator A5006086921 @default.
- W2624233223 creator A5008764613 @default.
- W2624233223 creator A5017929405 @default.
- W2624233223 creator A5026088504 @default.
- W2624233223 creator A5036345153 @default.
- W2624233223 creator A5055049791 @default.
- W2624233223 creator A5057724465 @default.
- W2624233223 creator A5061519579 @default.
- W2624233223 creator A5072638909 @default.
- W2624233223 date "2003-06-01" @default.
- W2624233223 modified "2023-09-27" @default.
- W2624233223 title "C4F6 1,3 Hexafluorobutadiene - A New Etching Gas: Studies on Material Compatibility, Behavior in Inductively Coupled Plasma and Etch Processes Performance" @default.
- W2624233223 hasPublicationYear "2003" @default.
- W2624233223 type Work @default.
- W2624233223 sameAs 2624233223 @default.
- W2624233223 citedByCount "0" @default.
- W2624233223 crossrefType "journal-article" @default.
- W2624233223 hasAuthorship W2624233223A5005447138 @default.
- W2624233223 hasAuthorship W2624233223A5006086921 @default.
- W2624233223 hasAuthorship W2624233223A5008764613 @default.
- W2624233223 hasAuthorship W2624233223A5017929405 @default.
- W2624233223 hasAuthorship W2624233223A5026088504 @default.
- W2624233223 hasAuthorship W2624233223A5036345153 @default.
- W2624233223 hasAuthorship W2624233223A5055049791 @default.
- W2624233223 hasAuthorship W2624233223A5057724465 @default.
- W2624233223 hasAuthorship W2624233223A5061519579 @default.
- W2624233223 hasAuthorship W2624233223A5072638909 @default.
- W2624233223 hasConcept C107872376 @default.
- W2624233223 hasConcept C113196181 @default.
- W2624233223 hasConcept C121332964 @default.
- W2624233223 hasConcept C127413603 @default.
- W2624233223 hasConcept C159985019 @default.
- W2624233223 hasConcept C171250308 @default.
- W2624233223 hasConcept C185592680 @default.
- W2624233223 hasConcept C192562407 @default.
- W2624233223 hasConcept C21880701 @default.
- W2624233223 hasConcept C2778648169 @default.
- W2624233223 hasConcept C39432304 @default.
- W2624233223 hasConcept C62520636 @default.
- W2624233223 hasConcept C82706917 @default.
- W2624233223 hasConcept C95974651 @default.
- W2624233223 hasConceptScore W2624233223C107872376 @default.
- W2624233223 hasConceptScore W2624233223C113196181 @default.
- W2624233223 hasConceptScore W2624233223C121332964 @default.
- W2624233223 hasConceptScore W2624233223C127413603 @default.
- W2624233223 hasConceptScore W2624233223C159985019 @default.
- W2624233223 hasConceptScore W2624233223C171250308 @default.
- W2624233223 hasConceptScore W2624233223C185592680 @default.
- W2624233223 hasConceptScore W2624233223C192562407 @default.
- W2624233223 hasConceptScore W2624233223C21880701 @default.
- W2624233223 hasConceptScore W2624233223C2778648169 @default.
- W2624233223 hasConceptScore W2624233223C39432304 @default.
- W2624233223 hasConceptScore W2624233223C62520636 @default.
- W2624233223 hasConceptScore W2624233223C82706917 @default.
- W2624233223 hasConceptScore W2624233223C95974651 @default.
- W2624233223 hasLocation W26242332231 @default.
- W2624233223 hasOpenAccess W2624233223 @default.
- W2624233223 hasPrimaryLocation W26242332231 @default.
- W2624233223 hasRelatedWork W1529542226 @default.
- W2624233223 hasRelatedWork W1634354754 @default.
- W2624233223 hasRelatedWork W1969195006 @default.
- W2624233223 hasRelatedWork W1977765471 @default.
- W2624233223 hasRelatedWork W1981901041 @default.
- W2624233223 hasRelatedWork W1986513592 @default.
- W2624233223 hasRelatedWork W1986868360 @default.
- W2624233223 hasRelatedWork W1992219747 @default.
- W2624233223 hasRelatedWork W2035403738 @default.
- W2624233223 hasRelatedWork W2045544987 @default.
- W2624233223 hasRelatedWork W2091861344 @default.
- W2624233223 hasRelatedWork W2143100100 @default.
- W2624233223 hasRelatedWork W2166888623 @default.
- W2624233223 hasRelatedWork W2288145299 @default.
- W2624233223 hasRelatedWork W2540099509 @default.
- W2624233223 hasRelatedWork W2906838515 @default.
- W2624233223 hasRelatedWork W431117103 @default.
- W2624233223 hasRelatedWork W879992098 @default.
- W2624233223 hasRelatedWork W1824772798 @default.
- W2624233223 hasRelatedWork W2271245144 @default.
- W2624233223 isParatext "false" @default.
- W2624233223 isRetracted "false" @default.
- W2624233223 magId "2624233223" @default.
- W2624233223 workType "article" @default.