Matches in SemOpenAlex for { <https://semopenalex.org/work/W2778855175> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2778855175 created "2018-01-05" @default.
- W2778855175 creator A5006029597 @default.
- W2778855175 creator A5042609189 @default.
- W2778855175 creator A5043477869 @default.
- W2778855175 creator A5044301016 @default.
- W2778855175 creator A5048108410 @default.
- W2778855175 creator A5052514400 @default.
- W2778855175 creator A5059981509 @default.
- W2778855175 creator A5060494370 @default.
- W2778855175 date "2007-10-14" @default.
- W2778855175 modified "2023-09-26" @default.
- W2778855175 title "A robust passivation-enhanced cryogenic process used for deep silicon etching" @default.
- W2778855175 hasPublicationYear "2007" @default.
- W2778855175 type Work @default.
- W2778855175 sameAs 2778855175 @default.
- W2778855175 citedByCount "0" @default.
- W2778855175 crossrefType "proceedings-article" @default.
- W2778855175 hasAuthorship W2778855175A5006029597 @default.
- W2778855175 hasAuthorship W2778855175A5042609189 @default.
- W2778855175 hasAuthorship W2778855175A5043477869 @default.
- W2778855175 hasAuthorship W2778855175A5044301016 @default.
- W2778855175 hasAuthorship W2778855175A5048108410 @default.
- W2778855175 hasAuthorship W2778855175A5052514400 @default.
- W2778855175 hasAuthorship W2778855175A5059981509 @default.
- W2778855175 hasAuthorship W2778855175A5060494370 @default.
- W2778855175 hasConcept C100460472 @default.
- W2778855175 hasConcept C111919701 @default.
- W2778855175 hasConcept C124634506 @default.
- W2778855175 hasConcept C130472188 @default.
- W2778855175 hasConcept C171250308 @default.
- W2778855175 hasConcept C192562407 @default.
- W2778855175 hasConcept C2779227376 @default.
- W2778855175 hasConcept C33574316 @default.
- W2778855175 hasConcept C41008148 @default.
- W2778855175 hasConcept C49040817 @default.
- W2778855175 hasConcept C544956773 @default.
- W2778855175 hasConcept C98045186 @default.
- W2778855175 hasConceptScore W2778855175C100460472 @default.
- W2778855175 hasConceptScore W2778855175C111919701 @default.
- W2778855175 hasConceptScore W2778855175C124634506 @default.
- W2778855175 hasConceptScore W2778855175C130472188 @default.
- W2778855175 hasConceptScore W2778855175C171250308 @default.
- W2778855175 hasConceptScore W2778855175C192562407 @default.
- W2778855175 hasConceptScore W2778855175C2779227376 @default.
- W2778855175 hasConceptScore W2778855175C33574316 @default.
- W2778855175 hasConceptScore W2778855175C41008148 @default.
- W2778855175 hasConceptScore W2778855175C49040817 @default.
- W2778855175 hasConceptScore W2778855175C544956773 @default.
- W2778855175 hasConceptScore W2778855175C98045186 @default.
- W2778855175 hasLocation W27788551751 @default.
- W2778855175 hasOpenAccess W2778855175 @default.
- W2778855175 hasPrimaryLocation W27788551751 @default.
- W2778855175 hasRelatedWork W1967627355 @default.
- W2778855175 hasRelatedWork W1998808240 @default.
- W2778855175 hasRelatedWork W2000849966 @default.
- W2778855175 hasRelatedWork W2060870204 @default.
- W2778855175 hasRelatedWork W2067053840 @default.
- W2778855175 hasRelatedWork W2149861862 @default.
- W2778855175 hasRelatedWork W2162908599 @default.
- W2778855175 hasRelatedWork W2601172683 @default.
- W2778855175 hasRelatedWork W2748603911 @default.
- W2778855175 hasRelatedWork W2515272839 @default.
- W2778855175 isParatext "false" @default.
- W2778855175 isRetracted "false" @default.
- W2778855175 magId "2778855175" @default.
- W2778855175 workType "article" @default.