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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2788131428> ?p ?o ?g. }

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• W2788131428 date "2018-02-08" @default.
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• W2788131428 title "Study on the low temperature and highly efficient deposition process of Silicon Oxide Gate Dielectric layers Using Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition" @default.
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