Matches in SemOpenAlex for { <https://semopenalex.org/work/W2794313715> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W2794313715 created "2018-03-29" @default.
- W2794313715 creator A5001797342 @default.
- W2794313715 creator A5005245427 @default.
- W2794313715 creator A5013441698 @default.
- W2794313715 creator A5046933691 @default.
- W2794313715 creator A5085242036 @default.
- W2794313715 date "2015-06-23" @default.
- W2794313715 modified "2023-09-27" @default.
- W2794313715 title "Electron beam lithography on multilayer substrates" @default.
- W2794313715 hasPublicationYear "2015" @default.
- W2794313715 type Work @default.
- W2794313715 sameAs 2794313715 @default.
- W2794313715 citedByCount "0" @default.
- W2794313715 crossrefType "journal-article" @default.
- W2794313715 hasAuthorship W2794313715A5001797342 @default.
- W2794313715 hasAuthorship W2794313715A5005245427 @default.
- W2794313715 hasAuthorship W2794313715A5013441698 @default.
- W2794313715 hasAuthorship W2794313715A5046933691 @default.
- W2794313715 hasAuthorship W2794313715A5085242036 @default.
- W2794313715 hasConcept C120665830 @default.
- W2794313715 hasConcept C121332964 @default.
- W2794313715 hasConcept C171250308 @default.
- W2794313715 hasConcept C192562407 @default.
- W2794313715 hasConcept C200274948 @default.
- W2794313715 hasConcept C204223013 @default.
- W2794313715 hasConcept C2779227376 @default.
- W2794313715 hasConcept C49040817 @default.
- W2794313715 hasConcept C53524968 @default.
- W2794313715 hasConceptScore W2794313715C120665830 @default.
- W2794313715 hasConceptScore W2794313715C121332964 @default.
- W2794313715 hasConceptScore W2794313715C171250308 @default.
- W2794313715 hasConceptScore W2794313715C192562407 @default.
- W2794313715 hasConceptScore W2794313715C200274948 @default.
- W2794313715 hasConceptScore W2794313715C204223013 @default.
- W2794313715 hasConceptScore W2794313715C2779227376 @default.
- W2794313715 hasConceptScore W2794313715C49040817 @default.
- W2794313715 hasConceptScore W2794313715C53524968 @default.
- W2794313715 hasLocation W27943137151 @default.
- W2794313715 hasOpenAccess W2794313715 @default.
- W2794313715 hasPrimaryLocation W27943137151 @default.
- W2794313715 hasRelatedWork W158269876 @default.
- W2794313715 hasRelatedWork W1969486968 @default.
- W2794313715 hasRelatedWork W1984540203 @default.
- W2794313715 hasRelatedWork W2068910694 @default.
- W2794313715 hasRelatedWork W2137377938 @default.
- W2794313715 hasRelatedWork W2152969116 @default.
- W2794313715 hasRelatedWork W2325092007 @default.
- W2794313715 hasRelatedWork W2479826369 @default.
- W2794313715 hasRelatedWork W2500462520 @default.
- W2794313715 hasRelatedWork W2601366221 @default.
- W2794313715 hasRelatedWork W2746576005 @default.
- W2794313715 hasRelatedWork W806091262 @default.
- W2794313715 hasRelatedWork W2752427987 @default.
- W2794313715 hasRelatedWork W2772850041 @default.
- W2794313715 hasRelatedWork W2817032382 @default.
- W2794313715 hasRelatedWork W2835072777 @default.
- W2794313715 hasRelatedWork W2928905428 @default.
- W2794313715 hasRelatedWork W2936452118 @default.
- W2794313715 hasRelatedWork W2938529255 @default.
- W2794313715 hasRelatedWork W3152311769 @default.
- W2794313715 isParatext "false" @default.
- W2794313715 isRetracted "false" @default.
- W2794313715 magId "2794313715" @default.
- W2794313715 workType "article" @default.