Matches in SemOpenAlex for { <https://semopenalex.org/work/W2810439547> ?p ?o ?g. }
Showing items 1 to 60 of
60
with 100 items per page.
- W2810439547 created "2018-07-10" @default.
- W2810439547 creator A5002712420 @default.
- W2810439547 date "2018-06-22" @default.
- W2810439547 modified "2023-09-24" @default.
- W2810439547 title "Atomic Layer Deposition of Metal Films for Contact Applications of Nanoscale Devices" @default.
- W2810439547 hasPublicationYear "2018" @default.
- W2810439547 type Work @default.
- W2810439547 sameAs 2810439547 @default.
- W2810439547 citedByCount "0" @default.
- W2810439547 crossrefType "journal-article" @default.
- W2810439547 hasAuthorship W2810439547A5002712420 @default.
- W2810439547 hasConcept C127313418 @default.
- W2810439547 hasConcept C151730666 @default.
- W2810439547 hasConcept C171250308 @default.
- W2810439547 hasConcept C191897082 @default.
- W2810439547 hasConcept C192562407 @default.
- W2810439547 hasConcept C2779227376 @default.
- W2810439547 hasConcept C2816523 @default.
- W2810439547 hasConcept C45206210 @default.
- W2810439547 hasConcept C544153396 @default.
- W2810439547 hasConcept C64297162 @default.
- W2810439547 hasConcept C69544855 @default.
- W2810439547 hasConceptScore W2810439547C127313418 @default.
- W2810439547 hasConceptScore W2810439547C151730666 @default.
- W2810439547 hasConceptScore W2810439547C171250308 @default.
- W2810439547 hasConceptScore W2810439547C191897082 @default.
- W2810439547 hasConceptScore W2810439547C192562407 @default.
- W2810439547 hasConceptScore W2810439547C2779227376 @default.
- W2810439547 hasConceptScore W2810439547C2816523 @default.
- W2810439547 hasConceptScore W2810439547C45206210 @default.
- W2810439547 hasConceptScore W2810439547C544153396 @default.
- W2810439547 hasConceptScore W2810439547C64297162 @default.
- W2810439547 hasConceptScore W2810439547C69544855 @default.
- W2810439547 hasLocation W28104395471 @default.
- W2810439547 hasOpenAccess W2810439547 @default.
- W2810439547 hasPrimaryLocation W28104395471 @default.
- W2810439547 hasRelatedWork W1952088108 @default.
- W2810439547 hasRelatedWork W2066649429 @default.
- W2810439547 hasRelatedWork W2252881456 @default.
- W2810439547 hasRelatedWork W2507356755 @default.
- W2810439547 hasRelatedWork W2584574075 @default.
- W2810439547 hasRelatedWork W2885268454 @default.
- W2810439547 hasRelatedWork W2900194722 @default.
- W2810439547 hasRelatedWork W2901254677 @default.
- W2810439547 hasRelatedWork W2921021755 @default.
- W2810439547 hasRelatedWork W2922432540 @default.
- W2810439547 hasRelatedWork W2941296407 @default.
- W2810439547 hasRelatedWork W3027455402 @default.
- W2810439547 hasRelatedWork W3047656237 @default.
- W2810439547 hasRelatedWork W3099742901 @default.
- W2810439547 hasRelatedWork W3119981030 @default.
- W2810439547 hasRelatedWork W3126943054 @default.
- W2810439547 hasRelatedWork W3131850585 @default.
- W2810439547 hasRelatedWork W3203297381 @default.
- W2810439547 hasRelatedWork W3207608989 @default.
- W2810439547 hasRelatedWork W3115627924 @default.
- W2810439547 isParatext "false" @default.
- W2810439547 isRetracted "false" @default.
- W2810439547 magId "2810439547" @default.
- W2810439547 workType "article" @default.