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• W2890740434 date "2018-09-04" @default.
• W2890740434 modified "2023-10-17" @default.
• W2890740434 title "ALD Al-doped ZnO Thin Film as Semiconductor and Piezoelectric Material: Process Synthesis" @default.
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• W2890740434 doi "https://doi.org/10.1007/978-3-319-93100-5_3" @default.
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