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W2893567523 created "2018-10-05" @default.
W2893567523 creator A5014993275 @default.
W2893567523 date "2018-09-28" @default.
W2893567523 modified "2023-09-28" @default.
W2893567523 title "E-beam Lithography using Dry Powder HSQ Resist Having Long Shelf Life and Nanogap Electrode Fabrication" @default.
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