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- W2893659488 created "2018-10-05" @default.
- W2893659488 creator A5019416352 @default.
- W2893659488 creator A5031500320 @default.
- W2893659488 creator A5053394054 @default.
- W2893659488 creator A5059236413 @default.
- W2893659488 creator A5071695435 @default.
- W2893659488 date "2017-11-01" @default.
- W2893659488 modified "2023-09-27" @default.
- W2893659488 title "Etching Feasibility of CoWP and CoWB as Selective Metallic Capping Layer in Cu Dual Damascene Interconnection" @default.
- W2893659488 doi "https://doi.org/10.1166/sam.2017.3205" @default.
- W2893659488 hasPublicationYear "2017" @default.
- W2893659488 type Work @default.
- W2893659488 sameAs 2893659488 @default.
- W2893659488 citedByCount "0" @default.
- W2893659488 crossrefType "journal-article" @default.
- W2893659488 hasAuthorship W2893659488A5019416352 @default.
- W2893659488 hasAuthorship W2893659488A5031500320 @default.
- W2893659488 hasAuthorship W2893659488A5053394054 @default.
- W2893659488 hasAuthorship W2893659488A5059236413 @default.
- W2893659488 hasAuthorship W2893659488A5071695435 @default.
- W2893659488 hasConcept C100460472 @default.
- W2893659488 hasConcept C116372231 @default.
- W2893659488 hasConcept C123745756 @default.
- W2893659488 hasConcept C124952713 @default.
- W2893659488 hasConcept C127413603 @default.
- W2893659488 hasConcept C142362112 @default.
- W2893659488 hasConcept C171250308 @default.
- W2893659488 hasConcept C191897082 @default.
- W2893659488 hasConcept C192562407 @default.
- W2893659488 hasConcept C2779227376 @default.
- W2893659488 hasConcept C2780980858 @default.
- W2893659488 hasConcept C2993148961 @default.
- W2893659488 hasConcept C49040817 @default.
- W2893659488 hasConcept C544153396 @default.
- W2893659488 hasConcept C76155785 @default.
- W2893659488 hasConceptScore W2893659488C100460472 @default.
- W2893659488 hasConceptScore W2893659488C116372231 @default.
- W2893659488 hasConceptScore W2893659488C123745756 @default.
- W2893659488 hasConceptScore W2893659488C124952713 @default.
- W2893659488 hasConceptScore W2893659488C127413603 @default.
- W2893659488 hasConceptScore W2893659488C142362112 @default.
- W2893659488 hasConceptScore W2893659488C171250308 @default.
- W2893659488 hasConceptScore W2893659488C191897082 @default.
- W2893659488 hasConceptScore W2893659488C192562407 @default.
- W2893659488 hasConceptScore W2893659488C2779227376 @default.
- W2893659488 hasConceptScore W2893659488C2780980858 @default.
- W2893659488 hasConceptScore W2893659488C2993148961 @default.
- W2893659488 hasConceptScore W2893659488C49040817 @default.
- W2893659488 hasConceptScore W2893659488C544153396 @default.
- W2893659488 hasConceptScore W2893659488C76155785 @default.
- W2893659488 hasLocation W28936594881 @default.
- W2893659488 hasOpenAccess W2893659488 @default.
- W2893659488 hasPrimaryLocation W28936594881 @default.
- W2893659488 hasRelatedWork W1966503155 @default.
- W2893659488 hasRelatedWork W2044018631 @default.
- W2893659488 hasRelatedWork W2128683920 @default.
- W2893659488 hasRelatedWork W2136084265 @default.
- W2893659488 hasRelatedWork W2156766675 @default.
- W2893659488 hasRelatedWork W2328884968 @default.
- W2893659488 hasRelatedWork W2507471754 @default.
- W2893659488 hasRelatedWork W2592416988 @default.
- W2893659488 hasRelatedWork W3168247356 @default.
- W2893659488 hasRelatedWork W1598263658 @default.
- W2893659488 hasRelatedWork W2165848863 @default.
- W2893659488 hasRelatedWork W2240861653 @default.
- W2893659488 hasRelatedWork W2264832905 @default.
- W2893659488 hasRelatedWork W2776532063 @default.
- W2893659488 hasRelatedWork W2820450801 @default.
- W2893659488 hasRelatedWork W2868742150 @default.
- W2893659488 hasRelatedWork W2872617546 @default.
- W2893659488 hasRelatedWork W2881569987 @default.
- W2893659488 hasRelatedWork W2936449295 @default.
- W2893659488 hasRelatedWork W3104354242 @default.
- W2893659488 isParatext "false" @default.
- W2893659488 isRetracted "false" @default.
- W2893659488 magId "2893659488" @default.
- W2893659488 workType "article" @default.