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- W2897776988 endingPage "952" @default.
- W2897776988 startingPage "944" @default.
- W2897776988 created "2018-10-26" @default.
- W2897776988 creator A5041034044 @default.
- W2897776988 creator A5059404193 @default.
- W2897776988 creator A5087458017 @default.
- W2897776988 date "2018-09-01" @default.
- W2897776988 modified "2023-10-15" @default.
- W2897776988 title "Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes" @default.
- W2897776988 cites W1899406093 @default.
- W2897776988 cites W2000413584 @default.
- W2897776988 cites W2013511339 @default.
- W2897776988 cites W2021259484 @default.
- W2897776988 cites W2027873498 @default.
- W2897776988 cites W2028054223 @default.
- W2897776988 cites W2034465054 @default.
- W2897776988 cites W2038900434 @default.
- W2897776988 cites W2045217346 @default.
- W2897776988 cites W2053625825 @default.
- W2897776988 cites W2067236285 @default.
- W2897776988 cites W2080631712 @default.
- W2897776988 cites W2243108855 @default.
- W2897776988 cites W2416856668 @default.
- W2897776988 cites W2435474170 @default.
- W2897776988 cites W2571931967 @default.
- W2897776988 cites W2599403765 @default.
- W2897776988 cites W2799455006 @default.
- W2897776988 cites W4239447119 @default.
- W2897776988 doi "https://doi.org/10.1134/s1027451018050324" @default.
- W2897776988 hasPublicationYear "2018" @default.
- W2897776988 type Work @default.
- W2897776988 sameAs 2897776988 @default.
- W2897776988 citedByCount "8" @default.
- W2897776988 countsByYear W28977769882019 @default.
- W2897776988 countsByYear W28977769882020 @default.
- W2897776988 countsByYear W28977769882022 @default.
- W2897776988 countsByYear W28977769882023 @default.
- W2897776988 crossrefType "journal-article" @default.
- W2897776988 hasAuthorship W2897776988A5041034044 @default.
- W2897776988 hasAuthorship W2897776988A5059404193 @default.
- W2897776988 hasAuthorship W2897776988A5087458017 @default.
- W2897776988 hasConcept C120665830 @default.
- W2897776988 hasConcept C121332964 @default.
- W2897776988 hasConcept C137905882 @default.
- W2897776988 hasConcept C165005293 @default.
- W2897776988 hasConcept C171250308 @default.
- W2897776988 hasConcept C17525397 @default.
- W2897776988 hasConcept C192562407 @default.
- W2897776988 hasConcept C200274948 @default.
- W2897776988 hasConcept C204223013 @default.
- W2897776988 hasConcept C2777498775 @default.
- W2897776988 hasConcept C2779227376 @default.
- W2897776988 hasConcept C2779328170 @default.
- W2897776988 hasConcept C41008148 @default.
- W2897776988 hasConcept C41794268 @default.
- W2897776988 hasConcept C53524968 @default.
- W2897776988 hasConcept C62520636 @default.
- W2897776988 hasConcept C76155785 @default.
- W2897776988 hasConcept C89395315 @default.
- W2897776988 hasConceptScore W2897776988C120665830 @default.
- W2897776988 hasConceptScore W2897776988C121332964 @default.
- W2897776988 hasConceptScore W2897776988C137905882 @default.
- W2897776988 hasConceptScore W2897776988C165005293 @default.
- W2897776988 hasConceptScore W2897776988C171250308 @default.
- W2897776988 hasConceptScore W2897776988C17525397 @default.
- W2897776988 hasConceptScore W2897776988C192562407 @default.
- W2897776988 hasConceptScore W2897776988C200274948 @default.
- W2897776988 hasConceptScore W2897776988C204223013 @default.
- W2897776988 hasConceptScore W2897776988C2777498775 @default.
- W2897776988 hasConceptScore W2897776988C2779227376 @default.
- W2897776988 hasConceptScore W2897776988C2779328170 @default.
- W2897776988 hasConceptScore W2897776988C41008148 @default.
- W2897776988 hasConceptScore W2897776988C41794268 @default.
- W2897776988 hasConceptScore W2897776988C53524968 @default.
- W2897776988 hasConceptScore W2897776988C62520636 @default.
- W2897776988 hasConceptScore W2897776988C76155785 @default.
- W2897776988 hasConceptScore W2897776988C89395315 @default.
- W2897776988 hasIssue "5" @default.
- W2897776988 hasLocation W28977769881 @default.
- W2897776988 hasOpenAccess W2897776988 @default.
- W2897776988 hasPrimaryLocation W28977769881 @default.
- W2897776988 hasRelatedWork W1967732612 @default.
- W2897776988 hasRelatedWork W1970458722 @default.
- W2897776988 hasRelatedWork W1986828824 @default.
- W2897776988 hasRelatedWork W2004026453 @default.
- W2897776988 hasRelatedWork W2007880660 @default.
- W2897776988 hasRelatedWork W2157251016 @default.
- W2897776988 hasRelatedWork W2234767249 @default.
- W2897776988 hasRelatedWork W2264052921 @default.
- W2897776988 hasRelatedWork W2345933932 @default.
- W2897776988 hasRelatedWork W2503993276 @default.
- W2897776988 hasVolume "12" @default.
- W2897776988 isParatext "false" @default.
- W2897776988 isRetracted "false" @default.
- W2897776988 magId "2897776988" @default.
- W2897776988 workType "article" @default.