Matches in SemOpenAlex for { <https://semopenalex.org/work/W2902624574> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- W2902624574 created "2018-12-11" @default.
- W2902624574 creator A5010903174 @default.
- W2902624574 creator A5015452019 @default.
- W2902624574 creator A5017385371 @default.
- W2902624574 creator A5034917875 @default.
- W2902624574 creator A5037485632 @default.
- W2902624574 creator A5037534953 @default.
- W2902624574 creator A5047041033 @default.
- W2902624574 creator A5073054861 @default.
- W2902624574 creator A5078215502 @default.
- W2902624574 date "2018-01-01" @default.
- W2902624574 modified "2023-09-22" @default.
- W2902624574 title "Analysis of Current Research Status of Plasma Etch Process Model" @default.
- W2902624574 doi "https://doi.org/10.33079/jomm.18010104" @default.
- W2902624574 hasPublicationYear "2018" @default.
- W2902624574 type Work @default.
- W2902624574 sameAs 2902624574 @default.
- W2902624574 citedByCount "0" @default.
- W2902624574 crossrefType "journal-article" @default.
- W2902624574 hasAuthorship W2902624574A5010903174 @default.
- W2902624574 hasAuthorship W2902624574A5015452019 @default.
- W2902624574 hasAuthorship W2902624574A5017385371 @default.
- W2902624574 hasAuthorship W2902624574A5034917875 @default.
- W2902624574 hasAuthorship W2902624574A5037485632 @default.
- W2902624574 hasAuthorship W2902624574A5037534953 @default.
- W2902624574 hasAuthorship W2902624574A5047041033 @default.
- W2902624574 hasAuthorship W2902624574A5073054861 @default.
- W2902624574 hasAuthorship W2902624574A5078215502 @default.
- W2902624574 hasBestOaLocation W29026245741 @default.
- W2902624574 hasConcept C119599485 @default.
- W2902624574 hasConcept C127413603 @default.
- W2902624574 hasConcept C148043351 @default.
- W2902624574 hasConcept C199360897 @default.
- W2902624574 hasConcept C41008148 @default.
- W2902624574 hasConcept C98045186 @default.
- W2902624574 hasConceptScore W2902624574C119599485 @default.
- W2902624574 hasConceptScore W2902624574C127413603 @default.
- W2902624574 hasConceptScore W2902624574C148043351 @default.
- W2902624574 hasConceptScore W2902624574C199360897 @default.
- W2902624574 hasConceptScore W2902624574C41008148 @default.
- W2902624574 hasConceptScore W2902624574C98045186 @default.
- W2902624574 hasLocation W29026245741 @default.
- W2902624574 hasOpenAccess W2902624574 @default.
- W2902624574 hasPrimaryLocation W29026245741 @default.
- W2902624574 hasRelatedWork W1634354754 @default.
- W2902624574 hasRelatedWork W1977765471 @default.
- W2902624574 hasRelatedWork W1980279828 @default.
- W2902624574 hasRelatedWork W1986868360 @default.
- W2902624574 hasRelatedWork W1992219747 @default.
- W2902624574 hasRelatedWork W2005128739 @default.
- W2902624574 hasRelatedWork W2011132056 @default.
- W2902624574 hasRelatedWork W2080409179 @default.
- W2902624574 hasRelatedWork W2118178791 @default.
- W2902624574 hasRelatedWork W2185296995 @default.
- W2902624574 hasRelatedWork W2229162675 @default.
- W2902624574 hasRelatedWork W2373630748 @default.
- W2902624574 hasRelatedWork W2751730988 @default.
- W2902624574 hasRelatedWork W3170481153 @default.
- W2902624574 hasRelatedWork W44001989 @default.
- W2902624574 hasRelatedWork W51677222 @default.
- W2902624574 hasRelatedWork W1824772798 @default.
- W2902624574 hasRelatedWork W2737559160 @default.
- W2902624574 hasRelatedWork W2889290498 @default.
- W2902624574 hasRelatedWork W2994446708 @default.
- W2902624574 isParatext "false" @default.
- W2902624574 isRetracted "false" @default.
- W2902624574 magId "2902624574" @default.
- W2902624574 workType "article" @default.