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- W2904004062 endingPage "84" @default.
- W2904004062 startingPage "79" @default.
- W2904004062 created "2018-12-22" @default.
- W2904004062 creator A5008640978 @default.
- W2904004062 creator A5073289159 @default.
- W2904004062 creator A5076655145 @default.
- W2904004062 date "2001-06-28" @default.
- W2904004062 modified "2023-09-28" @default.
- W2904004062 title "Atomic Layer Etching of Si(100) at Room Temperature" @default.
- W2904004062 hasPublicationYear "2001" @default.
- W2904004062 type Work @default.
- W2904004062 sameAs 2904004062 @default.
- W2904004062 citedByCount "0" @default.
- W2904004062 crossrefType "journal-article" @default.
- W2904004062 hasAuthorship W2904004062A5008640978 @default.
- W2904004062 hasAuthorship W2904004062A5073289159 @default.
- W2904004062 hasAuthorship W2904004062A5076655145 @default.
- W2904004062 hasConcept C100460472 @default.
- W2904004062 hasConcept C121332964 @default.
- W2904004062 hasConcept C171250308 @default.
- W2904004062 hasConcept C192562407 @default.
- W2904004062 hasConcept C2779227376 @default.
- W2904004062 hasConcept C49040817 @default.
- W2904004062 hasConcept C61696701 @default.
- W2904004062 hasConcept C69544855 @default.
- W2904004062 hasConceptScore W2904004062C100460472 @default.
- W2904004062 hasConceptScore W2904004062C121332964 @default.
- W2904004062 hasConceptScore W2904004062C171250308 @default.
- W2904004062 hasConceptScore W2904004062C192562407 @default.
- W2904004062 hasConceptScore W2904004062C2779227376 @default.
- W2904004062 hasConceptScore W2904004062C49040817 @default.
- W2904004062 hasConceptScore W2904004062C61696701 @default.
- W2904004062 hasConceptScore W2904004062C69544855 @default.
- W2904004062 hasIssue "163" @default.
- W2904004062 hasLocation W29040040621 @default.
- W2904004062 hasOpenAccess W2904004062 @default.
- W2904004062 hasPrimaryLocation W29040040621 @default.
- W2904004062 hasRelatedWork W1516790800 @default.
- W2904004062 hasRelatedWork W1566774608 @default.
- W2904004062 hasRelatedWork W1966169014 @default.
- W2904004062 hasRelatedWork W1978527904 @default.
- W2904004062 hasRelatedWork W1995293486 @default.
- W2904004062 hasRelatedWork W2009420109 @default.
- W2904004062 hasRelatedWork W2027599878 @default.
- W2904004062 hasRelatedWork W2030982349 @default.
- W2904004062 hasRelatedWork W2032809545 @default.
- W2904004062 hasRelatedWork W2040730470 @default.
- W2904004062 hasRelatedWork W2044454990 @default.
- W2904004062 hasRelatedWork W2045293189 @default.
- W2904004062 hasRelatedWork W2055542123 @default.
- W2904004062 hasRelatedWork W2056494714 @default.
- W2904004062 hasRelatedWork W2091361981 @default.
- W2904004062 hasRelatedWork W2460302471 @default.
- W2904004062 hasRelatedWork W2461601339 @default.
- W2904004062 hasRelatedWork W2598927103 @default.
- W2904004062 hasRelatedWork W3146906064 @default.
- W2904004062 hasRelatedWork W2821435369 @default.
- W2904004062 hasVolume "101" @default.
- W2904004062 isParatext "false" @default.
- W2904004062 isRetracted "false" @default.
- W2904004062 magId "2904004062" @default.
- W2904004062 workType "article" @default.