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- W2908245016 created "2019-01-11" @default.
- W2908245016 creator A5001365155 @default.
- W2908245016 creator A5004791551 @default.
- W2908245016 creator A5008339489 @default.
- W2908245016 creator A5016409303 @default.
- W2908245016 creator A5037698785 @default.
- W2908245016 creator A5046703825 @default.
- W2908245016 creator A5056282791 @default.
- W2908245016 creator A5059539903 @default.
- W2908245016 creator A5069532463 @default.
- W2908245016 creator A5074822583 @default.
- W2908245016 creator A5075845702 @default.
- W2908245016 creator A5087148837 @default.
- W2908245016 date "2011-03-01" @default.
- W2908245016 modified "2023-10-16" @default.
- W2908245016 title "Characterizing Plasma Induced Damage to Ultra Low-k" @default.
- W2908245016 hasPublicationYear "2011" @default.
- W2908245016 type Work @default.
- W2908245016 sameAs 2908245016 @default.
- W2908245016 citedByCount "0" @default.
- W2908245016 crossrefType "proceedings-article" @default.
- W2908245016 hasAuthorship W2908245016A5001365155 @default.
- W2908245016 hasAuthorship W2908245016A5004791551 @default.
- W2908245016 hasAuthorship W2908245016A5008339489 @default.
- W2908245016 hasAuthorship W2908245016A5016409303 @default.
- W2908245016 hasAuthorship W2908245016A5037698785 @default.
- W2908245016 hasAuthorship W2908245016A5046703825 @default.
- W2908245016 hasAuthorship W2908245016A5056282791 @default.
- W2908245016 hasAuthorship W2908245016A5059539903 @default.
- W2908245016 hasAuthorship W2908245016A5069532463 @default.
- W2908245016 hasAuthorship W2908245016A5074822583 @default.
- W2908245016 hasAuthorship W2908245016A5075845702 @default.
- W2908245016 hasAuthorship W2908245016A5087148837 @default.
- W2908245016 hasConcept C121332964 @default.
- W2908245016 hasConcept C185544564 @default.
- W2908245016 hasConcept C192562407 @default.
- W2908245016 hasConcept C41008148 @default.
- W2908245016 hasConcept C82706917 @default.
- W2908245016 hasConceptScore W2908245016C121332964 @default.
- W2908245016 hasConceptScore W2908245016C185544564 @default.
- W2908245016 hasConceptScore W2908245016C192562407 @default.
- W2908245016 hasConceptScore W2908245016C41008148 @default.
- W2908245016 hasConceptScore W2908245016C82706917 @default.
- W2908245016 hasLocation W29082450161 @default.
- W2908245016 hasLocation W29082450162 @default.
- W2908245016 hasOpenAccess W2908245016 @default.
- W2908245016 hasPrimaryLocation W29082450161 @default.
- W2908245016 hasRelatedWork W2018879842 @default.
- W2908245016 hasRelatedWork W2737498735 @default.
- W2908245016 hasRelatedWork W2744391499 @default.
- W2908245016 hasRelatedWork W2748952813 @default.
- W2908245016 hasRelatedWork W2898370298 @default.
- W2908245016 hasRelatedWork W2899084033 @default.
- W2908245016 hasRelatedWork W3041790586 @default.
- W2908245016 hasRelatedWork W3120461830 @default.
- W2908245016 hasRelatedWork W4230250635 @default.
- W2908245016 hasRelatedWork W4292492973 @default.
- W2908245016 isParatext "false" @default.
- W2908245016 isRetracted "false" @default.
- W2908245016 magId "2908245016" @default.
- W2908245016 workType "article" @default.