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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2912133943> ?p ?o ?g. }

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• W2912133943 date "2019-03-04" @default.
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• W2912133943 title "Spin-on doping of phosphorus on Ge with a 9 nm amorphous Si capping layer to achieve n+/p shallow junctions through rapid thermal annealing" @default.
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