Matches in SemOpenAlex for { <https://semopenalex.org/work/W2938659531> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2938659531 created "2019-04-25" @default.
- W2938659531 creator A5073787453 @default.
- W2938659531 date "2016-12-12" @default.
- W2938659531 modified "2023-09-25" @default.
- W2938659531 title "Etching: Endpoint Detection" @default.
- W2938659531 cites W1969735916 @default.
- W2938659531 cites W1971751659 @default.
- W2938659531 cites W1978725199 @default.
- W2938659531 cites W1980834751 @default.
- W2938659531 cites W1983708828 @default.
- W2938659531 cites W1988420629 @default.
- W2938659531 cites W1989313424 @default.
- W2938659531 cites W1992575460 @default.
- W2938659531 cites W1992973307 @default.
- W2938659531 cites W2002190158 @default.
- W2938659531 cites W2003296302 @default.
- W2938659531 cites W2009166309 @default.
- W2938659531 cites W2014398652 @default.
- W2938659531 cites W2018890340 @default.
- W2938659531 cites W2021062468 @default.
- W2938659531 cites W2022549163 @default.
- W2938659531 cites W2032445301 @default.
- W2938659531 cites W2033854169 @default.
- W2938659531 cites W2034970509 @default.
- W2938659531 cites W2038657187 @default.
- W2938659531 cites W2039196945 @default.
- W2938659531 cites W2045143804 @default.
- W2938659531 cites W2045297623 @default.
- W2938659531 cites W2048477854 @default.
- W2938659531 cites W2058234621 @default.
- W2938659531 cites W2060204319 @default.
- W2938659531 cites W2060580014 @default.
- W2938659531 cites W2073197152 @default.
- W2938659531 cites W2073470132 @default.
- W2938659531 cites W2075156295 @default.
- W2938659531 cites W2075843067 @default.
- W2938659531 cites W2076322171 @default.
- W2938659531 cites W2080959777 @default.
- W2938659531 cites W2083623304 @default.
- W2938659531 cites W2095242962 @default.
- W2938659531 cites W2168793340 @default.
- W2938659531 cites W4249777652 @default.
- W2938659531 doi "https://doi.org/10.1081/e-eplt-120049619" @default.
- W2938659531 hasPublicationYear "2016" @default.
- W2938659531 type Work @default.
- W2938659531 sameAs 2938659531 @default.
- W2938659531 citedByCount "0" @default.
- W2938659531 crossrefType "book-chapter" @default.
- W2938659531 hasAuthorship W2938659531A5073787453 @default.
- W2938659531 hasConcept C41008148 @default.
- W2938659531 hasConceptScore W2938659531C41008148 @default.
- W2938659531 hasLocation W29386595311 @default.
- W2938659531 hasOpenAccess W2938659531 @default.
- W2938659531 hasPrimaryLocation W29386595311 @default.
- W2938659531 hasRelatedWork W2042408329 @default.
- W2938659531 hasRelatedWork W1503529748 @default.
- W2938659531 hasRelatedWork W2197354012 @default.
- W2938659531 hasRelatedWork W2259954263 @default.
- W2938659531 hasRelatedWork W2263605001 @default.
- W2938659531 hasRelatedWork W228835742 @default.
- W2938659531 hasRelatedWork W2758346758 @default.
- W2938659531 hasRelatedWork W2784394971 @default.
- W2938659531 hasRelatedWork W2802601428 @default.
- W2938659531 hasRelatedWork W2808801114 @default.
- W2938659531 hasRelatedWork W2821564193 @default.
- W2938659531 hasRelatedWork W2822106066 @default.
- W2938659531 hasRelatedWork W2833803162 @default.
- W2938659531 hasRelatedWork W2836454373 @default.
- W2938659531 hasRelatedWork W2862728041 @default.
- W2938659531 hasRelatedWork W2899619868 @default.
- W2938659531 hasRelatedWork W2907581438 @default.
- W2938659531 hasRelatedWork W2922842308 @default.
- W2938659531 hasRelatedWork W2924509922 @default.
- W2938659531 hasRelatedWork W2927567547 @default.
- W2938659531 isParatext "false" @default.
- W2938659531 isRetracted "false" @default.
- W2938659531 magId "2938659531" @default.
- W2938659531 workType "book-chapter" @default.