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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2952318457> ?p ?o ?g. }

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• W2952318457 date "2018-07-10" @default.
• W2952318457 modified "2023-09-23" @default.
• W2952318457 title "Infrared Spectroscopy of Deposition Process of Amorphous Carbon Film during Ethylene Plasma, Compared with during Other Hydrocarbon Plasmas" @default.
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