Matches in SemOpenAlex for { <https://semopenalex.org/work/W2952605627> ?p ?o ?g. }
Showing items 1 to 50 of
50
with 100 items per page.
- W2952605627 created "2019-06-27" @default.
- W2952605627 creator A5004012415 @default.
- W2952605627 creator A5017786549 @default.
- W2952605627 date "2019-01-01" @default.
- W2952605627 modified "2023-09-24" @default.
- W2952605627 title "Correction to: Nano - Precision Systems for Overlay in Advanced Lithography Processes" @default.
- W2952605627 doi "https://doi.org/10.1007/978-3-030-18180-2_18" @default.
- W2952605627 hasPublicationYear "2019" @default.
- W2952605627 type Work @default.
- W2952605627 sameAs 2952605627 @default.
- W2952605627 citedByCount "0" @default.
- W2952605627 crossrefType "book-chapter" @default.
- W2952605627 hasAuthorship W2952605627A5004012415 @default.
- W2952605627 hasAuthorship W2952605627A5017786549 @default.
- W2952605627 hasBestOaLocation W29526056271 @default.
- W2952605627 hasConcept C136085584 @default.
- W2952605627 hasConcept C159985019 @default.
- W2952605627 hasConcept C171250308 @default.
- W2952605627 hasConcept C192562407 @default.
- W2952605627 hasConcept C199360897 @default.
- W2952605627 hasConcept C204223013 @default.
- W2952605627 hasConcept C2780357685 @default.
- W2952605627 hasConcept C41008148 @default.
- W2952605627 hasConcept C49040817 @default.
- W2952605627 hasConceptScore W2952605627C136085584 @default.
- W2952605627 hasConceptScore W2952605627C159985019 @default.
- W2952605627 hasConceptScore W2952605627C171250308 @default.
- W2952605627 hasConceptScore W2952605627C192562407 @default.
- W2952605627 hasConceptScore W2952605627C199360897 @default.
- W2952605627 hasConceptScore W2952605627C204223013 @default.
- W2952605627 hasConceptScore W2952605627C2780357685 @default.
- W2952605627 hasConceptScore W2952605627C41008148 @default.
- W2952605627 hasConceptScore W2952605627C49040817 @default.
- W2952605627 hasLocation W29526056271 @default.
- W2952605627 hasOpenAccess W2952605627 @default.
- W2952605627 hasPrimaryLocation W29526056271 @default.
- W2952605627 hasRelatedWork W2000766035 @default.
- W2952605627 hasRelatedWork W2015265337 @default.
- W2952605627 hasRelatedWork W2032413298 @default.
- W2952605627 hasRelatedWork W2043176779 @default.
- W2952605627 hasRelatedWork W2045714625 @default.
- W2952605627 hasRelatedWork W2068280874 @default.
- W2952605627 hasRelatedWork W2077286051 @default.
- W2952605627 hasRelatedWork W2094793671 @default.
- W2952605627 hasRelatedWork W2793157920 @default.
- W2952605627 hasRelatedWork W2952605627 @default.
- W2952605627 isParatext "false" @default.
- W2952605627 isRetracted "false" @default.
- W2952605627 magId "2952605627" @default.
- W2952605627 workType "book-chapter" @default.