Matches in SemOpenAlex for { <https://semopenalex.org/work/W2957577360> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2957577360 endingPage "P406" @default.
- W2957577360 startingPage "P400" @default.
- W2957577360 created "2019-07-23" @default.
- W2957577360 creator A5042993333 @default.
- W2957577360 creator A5043588835 @default.
- W2957577360 creator A5047953332 @default.
- W2957577360 creator A5053073603 @default.
- W2957577360 creator A5056935196 @default.
- W2957577360 creator A5070161432 @default.
- W2957577360 creator A5077769295 @default.
- W2957577360 date "2019-01-01" @default.
- W2957577360 modified "2023-10-17" @default.
- W2957577360 title "High-Temperature Reactor Cleaning Using Chlorine Trifluoride Gas for Silicon Carbide Chemical Vapor Deposition" @default.
- W2957577360 cites W1620992192 @default.
- W2957577360 cites W1828409625 @default.
- W2957577360 cites W1988133629 @default.
- W2957577360 cites W2007529059 @default.
- W2957577360 cites W2058272047 @default.
- W2957577360 cites W2067188422 @default.
- W2957577360 cites W2085352474 @default.
- W2957577360 cites W2095779937 @default.
- W2957577360 cites W2099433594 @default.
- W2957577360 cites W2120933531 @default.
- W2957577360 cites W2225561795 @default.
- W2957577360 cites W2246792630 @default.
- W2957577360 cites W2334265631 @default.
- W2957577360 cites W2612301026 @default.
- W2957577360 cites W2729725204 @default.
- W2957577360 cites W2921769267 @default.
- W2957577360 doi "https://doi.org/10.1149/2.0081908jss" @default.
- W2957577360 hasPublicationYear "2019" @default.
- W2957577360 type Work @default.
- W2957577360 sameAs 2957577360 @default.
- W2957577360 citedByCount "3" @default.
- W2957577360 countsByYear W29575773602020 @default.
- W2957577360 countsByYear W29575773602021 @default.
- W2957577360 countsByYear W29575773602022 @default.
- W2957577360 crossrefType "journal-article" @default.
- W2957577360 hasAuthorship W2957577360A5042993333 @default.
- W2957577360 hasAuthorship W2957577360A5043588835 @default.
- W2957577360 hasAuthorship W2957577360A5047953332 @default.
- W2957577360 hasAuthorship W2957577360A5053073603 @default.
- W2957577360 hasAuthorship W2957577360A5056935196 @default.
- W2957577360 hasAuthorship W2957577360A5070161432 @default.
- W2957577360 hasAuthorship W2957577360A5077769295 @default.
- W2957577360 hasConcept C127413603 @default.
- W2957577360 hasConcept C151730666 @default.
- W2957577360 hasConcept C171250308 @default.
- W2957577360 hasConcept C191897082 @default.
- W2957577360 hasConcept C192562407 @default.
- W2957577360 hasConcept C2780722187 @default.
- W2957577360 hasConcept C2816523 @default.
- W2957577360 hasConcept C42360764 @default.
- W2957577360 hasConcept C505241676 @default.
- W2957577360 hasConcept C57410435 @default.
- W2957577360 hasConcept C64297162 @default.
- W2957577360 hasConcept C86803240 @default.
- W2957577360 hasConceptScore W2957577360C127413603 @default.
- W2957577360 hasConceptScore W2957577360C151730666 @default.
- W2957577360 hasConceptScore W2957577360C171250308 @default.
- W2957577360 hasConceptScore W2957577360C191897082 @default.
- W2957577360 hasConceptScore W2957577360C192562407 @default.
- W2957577360 hasConceptScore W2957577360C2780722187 @default.
- W2957577360 hasConceptScore W2957577360C2816523 @default.
- W2957577360 hasConceptScore W2957577360C42360764 @default.
- W2957577360 hasConceptScore W2957577360C505241676 @default.
- W2957577360 hasConceptScore W2957577360C57410435 @default.
- W2957577360 hasConceptScore W2957577360C64297162 @default.
- W2957577360 hasConceptScore W2957577360C86803240 @default.
- W2957577360 hasIssue "8" @default.
- W2957577360 hasLocation W29575773601 @default.
- W2957577360 hasOpenAccess W2957577360 @default.
- W2957577360 hasPrimaryLocation W29575773601 @default.
- W2957577360 hasRelatedWork W1601986914 @default.
- W2957577360 hasRelatedWork W1976866826 @default.
- W2957577360 hasRelatedWork W1997569205 @default.
- W2957577360 hasRelatedWork W2030248755 @default.
- W2957577360 hasRelatedWork W2100958990 @default.
- W2957577360 hasRelatedWork W2320683507 @default.
- W2957577360 hasRelatedWork W2748952813 @default.
- W2957577360 hasRelatedWork W2899084033 @default.
- W2957577360 hasRelatedWork W2913277734 @default.
- W2957577360 hasRelatedWork W3181054684 @default.
- W2957577360 hasVolume "8" @default.
- W2957577360 isParatext "false" @default.
- W2957577360 isRetracted "false" @default.
- W2957577360 magId "2957577360" @default.
- W2957577360 workType "article" @default.