Matches in SemOpenAlex for { <https://semopenalex.org/work/W2983751305> ?p ?o ?g. }
Showing items 1 to 53 of
53
with 100 items per page.
- W2983751305 created "2019-11-22" @default.
- W2983751305 creator A5067154914 @default.
- W2983751305 date "2020-04-17" @default.
- W2983751305 modified "2023-10-18" @default.
- W2983751305 title "electron beam lithography" @default.
- W2983751305 doi "https://doi.org/10.1002/9783527809080.cataz06220" @default.
- W2983751305 hasPublicationYear "2020" @default.
- W2983751305 type Work @default.
- W2983751305 sameAs 2983751305 @default.
- W2983751305 citedByCount "0" @default.
- W2983751305 crossrefType "other" @default.
- W2983751305 hasAuthorship W2983751305A5067154914 @default.
- W2983751305 hasConcept C120665830 @default.
- W2983751305 hasConcept C121332964 @default.
- W2983751305 hasConcept C163581340 @default.
- W2983751305 hasConcept C171250308 @default.
- W2983751305 hasConcept C192562407 @default.
- W2983751305 hasConcept C200274948 @default.
- W2983751305 hasConcept C204223013 @default.
- W2983751305 hasConcept C2779227376 @default.
- W2983751305 hasConcept C41794268 @default.
- W2983751305 hasConcept C49040817 @default.
- W2983751305 hasConcept C53524968 @default.
- W2983751305 hasConcept C70520399 @default.
- W2983751305 hasConceptScore W2983751305C120665830 @default.
- W2983751305 hasConceptScore W2983751305C121332964 @default.
- W2983751305 hasConceptScore W2983751305C163581340 @default.
- W2983751305 hasConceptScore W2983751305C171250308 @default.
- W2983751305 hasConceptScore W2983751305C192562407 @default.
- W2983751305 hasConceptScore W2983751305C200274948 @default.
- W2983751305 hasConceptScore W2983751305C204223013 @default.
- W2983751305 hasConceptScore W2983751305C2779227376 @default.
- W2983751305 hasConceptScore W2983751305C41794268 @default.
- W2983751305 hasConceptScore W2983751305C49040817 @default.
- W2983751305 hasConceptScore W2983751305C53524968 @default.
- W2983751305 hasConceptScore W2983751305C70520399 @default.
- W2983751305 hasLocation W29837513051 @default.
- W2983751305 hasOpenAccess W2983751305 @default.
- W2983751305 hasPrimaryLocation W29837513051 @default.
- W2983751305 hasRelatedWork W18573621 @default.
- W2983751305 hasRelatedWork W1876959 @default.
- W2983751305 hasRelatedWork W20643291 @default.
- W2983751305 hasRelatedWork W31771812 @default.
- W2983751305 hasRelatedWork W32080351 @default.
- W2983751305 hasRelatedWork W36660467 @default.
- W2983751305 hasRelatedWork W38667942 @default.
- W2983751305 hasRelatedWork W40284206 @default.
- W2983751305 hasRelatedWork W40399828 @default.
- W2983751305 hasRelatedWork W47139966 @default.
- W2983751305 isParatext "false" @default.
- W2983751305 isRetracted "false" @default.
- W2983751305 magId "2983751305" @default.
- W2983751305 workType "other" @default.