Matches in SemOpenAlex for { <https://semopenalex.org/work/W3003383840> ?p ?o ?g. }
- W3003383840 endingPage "2041" @default.
- W3003383840 startingPage "2029" @default.
- W3003383840 created "2020-02-07" @default.
- W3003383840 creator A5018191368 @default.
- W3003383840 creator A5031382731 @default.
- W3003383840 creator A5054858388 @default.
- W3003383840 creator A5072077664 @default.
- W3003383840 creator A5073538004 @default.
- W3003383840 creator A5075971832 @default.
- W3003383840 creator A5084467918 @default.
- W3003383840 creator A5091334730 @default.
- W3003383840 date "2020-01-31" @default.
- W3003383840 modified "2023-10-18" @default.
- W3003383840 title "Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization" @default.
- W3003383840 cites W1502124325 @default.
- W3003383840 cites W1634262285 @default.
- W3003383840 cites W1963735355 @default.
- W3003383840 cites W2012457726 @default.
- W3003383840 cites W2058148633 @default.
- W3003383840 cites W2088370947 @default.
- W3003383840 cites W2095879268 @default.
- W3003383840 cites W2096042473 @default.
- W3003383840 cites W2096677542 @default.
- W3003383840 cites W2100647019 @default.
- W3003383840 cites W2104582418 @default.
- W3003383840 cites W2108261080 @default.
- W3003383840 cites W2118655703 @default.
- W3003383840 cites W2127824985 @default.
- W3003383840 cites W2132407604 @default.
- W3003383840 cites W2143545745 @default.
- W3003383840 cites W2156285590 @default.
- W3003383840 cites W2156576069 @default.
- W3003383840 cites W2157887497 @default.
- W3003383840 cites W2161539132 @default.
- W3003383840 cites W2167978216 @default.
- W3003383840 cites W2169714075 @default.
- W3003383840 cites W2171505706 @default.
- W3003383840 cites W2285352511 @default.
- W3003383840 cites W2332629643 @default.
- W3003383840 cites W2500479162 @default.
- W3003383840 cites W2513620156 @default.
- W3003383840 cites W2531826863 @default.
- W3003383840 cites W2535997585 @default.
- W3003383840 cites W2554963620 @default.
- W3003383840 cites W2563283759 @default.
- W3003383840 cites W2586465226 @default.
- W3003383840 cites W2600729331 @default.
- W3003383840 cites W2607066226 @default.
- W3003383840 cites W2752548690 @default.
- W3003383840 cites W2890593070 @default.
- W3003383840 cites W2946723398 @default.
- W3003383840 cites W317681493 @default.
- W3003383840 cites W4230558476 @default.
- W3003383840 cites W4234806561 @default.
- W3003383840 cites W4240044222 @default.
- W3003383840 cites W4367338534 @default.
- W3003383840 cites W4376848482 @default.
- W3003383840 cites W2096334643 @default.
- W3003383840 doi "https://doi.org/10.1007/s00542-020-04755-3" @default.
- W3003383840 hasPublicationYear "2020" @default.
- W3003383840 type Work @default.
- W3003383840 sameAs 3003383840 @default.
- W3003383840 citedByCount "22" @default.
- W3003383840 countsByYear W30033838402020 @default.
- W3003383840 countsByYear W30033838402021 @default.
- W3003383840 countsByYear W30033838402022 @default.
- W3003383840 countsByYear W30033838402023 @default.
- W3003383840 crossrefType "journal-article" @default.
- W3003383840 hasAuthorship W3003383840A5018191368 @default.
- W3003383840 hasAuthorship W3003383840A5031382731 @default.
- W3003383840 hasAuthorship W3003383840A5054858388 @default.
- W3003383840 hasAuthorship W3003383840A5072077664 @default.
- W3003383840 hasAuthorship W3003383840A5073538004 @default.
- W3003383840 hasAuthorship W3003383840A5075971832 @default.
- W3003383840 hasAuthorship W3003383840A5084467918 @default.
- W3003383840 hasAuthorship W3003383840A5091334730 @default.
- W3003383840 hasConcept C119599485 @default.
- W3003383840 hasConcept C127413603 @default.
- W3003383840 hasConcept C133386390 @default.
- W3003383840 hasConcept C134406635 @default.
- W3003383840 hasConcept C136525101 @default.
- W3003383840 hasConcept C142724271 @default.
- W3003383840 hasConcept C145667562 @default.
- W3003383840 hasConcept C159985019 @default.
- W3003383840 hasConcept C164705383 @default.
- W3003383840 hasConcept C165801399 @default.
- W3003383840 hasConcept C192562407 @default.
- W3003383840 hasConcept C204787440 @default.
- W3003383840 hasConcept C206755178 @default.
- W3003383840 hasConcept C2779227376 @default.
- W3003383840 hasConcept C2780968331 @default.
- W3003383840 hasConcept C37977207 @default.
- W3003383840 hasConcept C41625074 @default.
- W3003383840 hasConcept C49040817 @default.
- W3003383840 hasConcept C52192207 @default.
- W3003383840 hasConcept C54355233 @default.
- W3003383840 hasConcept C71924100 @default.
- W3003383840 hasConcept C86803240 @default.
- W3003383840 hasConcept C90327742 @default.
- W3003383840 hasConceptScore W3003383840C119599485 @default.