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• W3021359204 created "2020-05-13" @default.
• W3021359204 creator A5007764206 @default.
• W3021359204 date "1987-01-01" @default.
• W3021359204 modified "2023-09-26" @default.
• W3021359204 title "Gate Metallization" @default.
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• W3021359204 doi "https://doi.org/10.1016/b978-0-12-234115-1.50009-x" @default.
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