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- W3023422082 startingPage "5109" @default.
- W3023422082 created "2020-05-13" @default.
- W3023422082 creator A5060091087 @default.
- W3023422082 date "2001-01-01" @default.
- W3023422082 modified "2023-09-23" @default.
- W3023422082 title "Correlating absolute concentrations of gas-phase species determined by microwave, Fourier transform infrared, and atomic absorption spectroscopies to properties of silicon dioxide films deposited in an electron cyclotron resonance reactor" @default.
- W3023422082 hasPublicationYear "2001" @default.
- W3023422082 type Work @default.
- W3023422082 sameAs 3023422082 @default.
- W3023422082 citedByCount "0" @default.
- W3023422082 crossrefType "journal-article" @default.
- W3023422082 hasAuthorship W3023422082A5060091087 @default.
- W3023422082 hasConcept C102519508 @default.
- W3023422082 hasConcept C107872376 @default.
- W3023422082 hasConcept C113196181 @default.
- W3023422082 hasConcept C120665830 @default.
- W3023422082 hasConcept C121332964 @default.
- W3023422082 hasConcept C125287762 @default.
- W3023422082 hasConcept C132427895 @default.
- W3023422082 hasConcept C139210041 @default.
- W3023422082 hasConcept C145148216 @default.
- W3023422082 hasConcept C147789679 @default.
- W3023422082 hasConcept C153642686 @default.
- W3023422082 hasConcept C158355884 @default.
- W3023422082 hasConcept C159985019 @default.
- W3023422082 hasConcept C160892712 @default.
- W3023422082 hasConcept C162356407 @default.
- W3023422082 hasConcept C170552419 @default.
- W3023422082 hasConcept C175361016 @default.
- W3023422082 hasConcept C178790620 @default.
- W3023422082 hasConcept C184779094 @default.
- W3023422082 hasConcept C185592680 @default.
- W3023422082 hasConcept C192562407 @default.
- W3023422082 hasConcept C3020013744 @default.
- W3023422082 hasConcept C39527238 @default.
- W3023422082 hasConcept C43617362 @default.
- W3023422082 hasConcept C44280652 @default.
- W3023422082 hasConcept C44838205 @default.
- W3023422082 hasConcept C49040817 @default.
- W3023422082 hasConcept C544956773 @default.
- W3023422082 hasConcept C62520636 @default.
- W3023422082 hasConceptScore W3023422082C102519508 @default.
- W3023422082 hasConceptScore W3023422082C107872376 @default.
- W3023422082 hasConceptScore W3023422082C113196181 @default.
- W3023422082 hasConceptScore W3023422082C120665830 @default.
- W3023422082 hasConceptScore W3023422082C121332964 @default.
- W3023422082 hasConceptScore W3023422082C125287762 @default.
- W3023422082 hasConceptScore W3023422082C132427895 @default.
- W3023422082 hasConceptScore W3023422082C139210041 @default.
- W3023422082 hasConceptScore W3023422082C145148216 @default.
- W3023422082 hasConceptScore W3023422082C147789679 @default.
- W3023422082 hasConceptScore W3023422082C153642686 @default.
- W3023422082 hasConceptScore W3023422082C158355884 @default.
- W3023422082 hasConceptScore W3023422082C159985019 @default.
- W3023422082 hasConceptScore W3023422082C160892712 @default.
- W3023422082 hasConceptScore W3023422082C162356407 @default.
- W3023422082 hasConceptScore W3023422082C170552419 @default.
- W3023422082 hasConceptScore W3023422082C175361016 @default.
- W3023422082 hasConceptScore W3023422082C178790620 @default.
- W3023422082 hasConceptScore W3023422082C184779094 @default.
- W3023422082 hasConceptScore W3023422082C185592680 @default.
- W3023422082 hasConceptScore W3023422082C192562407 @default.
- W3023422082 hasConceptScore W3023422082C3020013744 @default.
- W3023422082 hasConceptScore W3023422082C39527238 @default.
- W3023422082 hasConceptScore W3023422082C43617362 @default.
- W3023422082 hasConceptScore W3023422082C44280652 @default.
- W3023422082 hasConceptScore W3023422082C44838205 @default.
- W3023422082 hasConceptScore W3023422082C49040817 @default.
- W3023422082 hasConceptScore W3023422082C544956773 @default.
- W3023422082 hasConceptScore W3023422082C62520636 @default.
- W3023422082 hasLocation W30234220821 @default.
- W3023422082 hasOpenAccess W3023422082 @default.
- W3023422082 hasPrimaryLocation W30234220821 @default.
- W3023422082 hasRelatedWork W108246212 @default.
- W3023422082 hasRelatedWork W1485151805 @default.
- W3023422082 hasRelatedWork W1989605237 @default.
- W3023422082 hasRelatedWork W1991514760 @default.
- W3023422082 hasRelatedWork W1996239662 @default.
- W3023422082 hasRelatedWork W2006511353 @default.
- W3023422082 hasRelatedWork W2014069369 @default.
- W3023422082 hasRelatedWork W2021648469 @default.
- W3023422082 hasRelatedWork W2027347151 @default.
- W3023422082 hasRelatedWork W2053534712 @default.
- W3023422082 hasRelatedWork W2065810082 @default.
- W3023422082 hasRelatedWork W2071425917 @default.
- W3023422082 hasRelatedWork W2078217603 @default.
- W3023422082 hasRelatedWork W2146926359 @default.
- W3023422082 hasRelatedWork W2287196327 @default.
- W3023422082 hasRelatedWork W2330841310 @default.
- W3023422082 hasRelatedWork W23587714 @default.
- W3023422082 hasRelatedWork W273959820 @default.
- W3023422082 hasRelatedWork W582410558 @default.
- W3023422082 hasRelatedWork W646556067 @default.
- W3023422082 isParatext "false" @default.
- W3023422082 isRetracted "false" @default.
- W3023422082 magId "3023422082" @default.
- W3023422082 workType "article" @default.