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- W3023811388 created "2020-05-13" @default.
- W3023811388 creator A5015075107 @default.
- W3023811388 creator A5046537154 @default.
- W3023811388 creator A5080875984 @default.
- W3023811388 date "2000-10-01" @default.
- W3023811388 modified "2023-09-24" @default.
- W3023811388 title "Emission and Electrical Measurements to Assess Actinometry in SF6/Ar/O2 SiC Etching Discharges" @default.
- W3023811388 hasPublicationYear "2000" @default.
- W3023811388 type Work @default.
- W3023811388 sameAs 3023811388 @default.
- W3023811388 citedByCount "0" @default.
- W3023811388 crossrefType "journal-article" @default.
- W3023811388 hasAuthorship W3023811388A5015075107 @default.
- W3023811388 hasAuthorship W3023811388A5046537154 @default.
- W3023811388 hasAuthorship W3023811388A5080875984 @default.
- W3023811388 hasConcept C100460472 @default.
- W3023811388 hasConcept C107872376 @default.
- W3023811388 hasConcept C113196181 @default.
- W3023811388 hasConcept C121332964 @default.
- W3023811388 hasConcept C168566512 @default.
- W3023811388 hasConcept C171250308 @default.
- W3023811388 hasConcept C184779094 @default.
- W3023811388 hasConcept C185544564 @default.
- W3023811388 hasConcept C185592680 @default.
- W3023811388 hasConcept C192562407 @default.
- W3023811388 hasConcept C2779227376 @default.
- W3023811388 hasConcept C547737533 @default.
- W3023811388 hasConcept C82706917 @default.
- W3023811388 hasConceptScore W3023811388C100460472 @default.
- W3023811388 hasConceptScore W3023811388C107872376 @default.
- W3023811388 hasConceptScore W3023811388C113196181 @default.
- W3023811388 hasConceptScore W3023811388C121332964 @default.
- W3023811388 hasConceptScore W3023811388C168566512 @default.
- W3023811388 hasConceptScore W3023811388C171250308 @default.
- W3023811388 hasConceptScore W3023811388C184779094 @default.
- W3023811388 hasConceptScore W3023811388C185544564 @default.
- W3023811388 hasConceptScore W3023811388C185592680 @default.
- W3023811388 hasConceptScore W3023811388C192562407 @default.
- W3023811388 hasConceptScore W3023811388C2779227376 @default.
- W3023811388 hasConceptScore W3023811388C547737533 @default.
- W3023811388 hasConceptScore W3023811388C82706917 @default.
- W3023811388 hasLocation W30238113881 @default.
- W3023811388 hasOpenAccess W3023811388 @default.
- W3023811388 hasPrimaryLocation W30238113881 @default.
- W3023811388 hasRelatedWork W2013692760 @default.
- W3023811388 hasRelatedWork W2016676028 @default.
- W3023811388 hasRelatedWork W2019209156 @default.
- W3023811388 hasRelatedWork W2019452230 @default.
- W3023811388 hasRelatedWork W2029023938 @default.
- W3023811388 hasRelatedWork W2036267434 @default.
- W3023811388 hasRelatedWork W2053165834 @default.
- W3023811388 hasRelatedWork W2095318841 @default.
- W3023811388 hasRelatedWork W2128346471 @default.
- W3023811388 hasRelatedWork W2131517240 @default.
- W3023811388 hasRelatedWork W2149635932 @default.
- W3023811388 hasRelatedWork W2164848720 @default.
- W3023811388 hasRelatedWork W2183938452 @default.
- W3023811388 hasRelatedWork W2475699958 @default.
- W3023811388 hasRelatedWork W2606605072 @default.
- W3023811388 hasRelatedWork W2788510250 @default.
- W3023811388 hasRelatedWork W2966007828 @default.
- W3023811388 hasRelatedWork W3025071632 @default.
- W3023811388 hasRelatedWork W3088737661 @default.
- W3023811388 hasRelatedWork W3202222294 @default.
- W3023811388 isParatext "false" @default.
- W3023811388 isRetracted "false" @default.
- W3023811388 magId "3023811388" @default.
- W3023811388 workType "article" @default.