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- W3024070963 created "2020-05-21" @default.
- W3024070963 creator A5020892229 @default.
- W3024070963 creator A5087258577 @default.
- W3024070963 date "1994-01-01" @default.
- W3024070963 modified "2023-09-24" @default.
- W3024070963 title "모든 3차 수차를 제거하여 회절한계의 성능을 지닌 극자외선 lithography용 4-반사경 광학계(배율=1) = Four-mirror optical imaging system (magnification=1) for subhalf-micron lithography derived from the solutions of all zero 3rd order optical aberrations" @default.
- W3024070963 hasPublicationYear "1994" @default.
- W3024070963 type Work @default.
- W3024070963 sameAs 3024070963 @default.
- W3024070963 citedByCount "0" @default.
- W3024070963 crossrefType "dissertation" @default.
- W3024070963 hasAuthorship W3024070963A5020892229 @default.
- W3024070963 hasAuthorship W3024070963A5087258577 @default.
- W3024070963 hasConcept C105487726 @default.
- W3024070963 hasConcept C120665830 @default.
- W3024070963 hasConcept C121332964 @default.
- W3024070963 hasConcept C138885662 @default.
- W3024070963 hasConcept C162996421 @default.
- W3024070963 hasConcept C163581340 @default.
- W3024070963 hasConcept C171250308 @default.
- W3024070963 hasConcept C182873914 @default.
- W3024070963 hasConcept C192562407 @default.
- W3024070963 hasConcept C200274948 @default.
- W3024070963 hasConcept C204223013 @default.
- W3024070963 hasConcept C2779227376 @default.
- W3024070963 hasConcept C2780813799 @default.
- W3024070963 hasConcept C28826006 @default.
- W3024070963 hasConcept C2987642246 @default.
- W3024070963 hasConcept C2993784581 @default.
- W3024070963 hasConcept C33923547 @default.
- W3024070963 hasConcept C4144372 @default.
- W3024070963 hasConcept C41794268 @default.
- W3024070963 hasConcept C41895202 @default.
- W3024070963 hasConcept C53524968 @default.
- W3024070963 hasConcept C92630104 @default.
- W3024070963 hasConceptScore W3024070963C105487726 @default.
- W3024070963 hasConceptScore W3024070963C120665830 @default.
- W3024070963 hasConceptScore W3024070963C121332964 @default.
- W3024070963 hasConceptScore W3024070963C138885662 @default.
- W3024070963 hasConceptScore W3024070963C162996421 @default.
- W3024070963 hasConceptScore W3024070963C163581340 @default.
- W3024070963 hasConceptScore W3024070963C171250308 @default.
- W3024070963 hasConceptScore W3024070963C182873914 @default.
- W3024070963 hasConceptScore W3024070963C192562407 @default.
- W3024070963 hasConceptScore W3024070963C200274948 @default.
- W3024070963 hasConceptScore W3024070963C204223013 @default.
- W3024070963 hasConceptScore W3024070963C2779227376 @default.
- W3024070963 hasConceptScore W3024070963C2780813799 @default.
- W3024070963 hasConceptScore W3024070963C28826006 @default.
- W3024070963 hasConceptScore W3024070963C2987642246 @default.
- W3024070963 hasConceptScore W3024070963C2993784581 @default.
- W3024070963 hasConceptScore W3024070963C33923547 @default.
- W3024070963 hasConceptScore W3024070963C4144372 @default.
- W3024070963 hasConceptScore W3024070963C41794268 @default.
- W3024070963 hasConceptScore W3024070963C41895202 @default.
- W3024070963 hasConceptScore W3024070963C53524968 @default.
- W3024070963 hasConceptScore W3024070963C92630104 @default.
- W3024070963 hasLocation W30240709631 @default.
- W3024070963 hasOpenAccess W3024070963 @default.
- W3024070963 hasPrimaryLocation W30240709631 @default.
- W3024070963 isParatext "false" @default.
- W3024070963 isRetracted "false" @default.
- W3024070963 magId "3024070963" @default.
- W3024070963 workType "dissertation" @default.