Matches in SemOpenAlex for { <https://semopenalex.org/work/W3025526567> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W3025526567 created "2020-05-21" @default.
- W3025526567 creator A5007014949 @default.
- W3025526567 creator A5008415538 @default.
- W3025526567 creator A5053779192 @default.
- W3025526567 creator A5059102817 @default.
- W3025526567 creator A5091429461 @default.
- W3025526567 date "2000-10-01" @default.
- W3025526567 modified "2023-09-28" @default.
- W3025526567 title "Development of a New Sputter System using Magnetic Neutral Loop Discharge Plasma Technology" @default.
- W3025526567 hasPublicationYear "2000" @default.
- W3025526567 type Work @default.
- W3025526567 sameAs 3025526567 @default.
- W3025526567 citedByCount "0" @default.
- W3025526567 crossrefType "journal-article" @default.
- W3025526567 hasAuthorship W3025526567A5007014949 @default.
- W3025526567 hasAuthorship W3025526567A5008415538 @default.
- W3025526567 hasAuthorship W3025526567A5053779192 @default.
- W3025526567 hasAuthorship W3025526567A5059102817 @default.
- W3025526567 hasAuthorship W3025526567A5091429461 @default.
- W3025526567 hasConcept C114614502 @default.
- W3025526567 hasConcept C121332964 @default.
- W3025526567 hasConcept C171250308 @default.
- W3025526567 hasConcept C184670325 @default.
- W3025526567 hasConcept C19067145 @default.
- W3025526567 hasConcept C192562407 @default.
- W3025526567 hasConcept C22423302 @default.
- W3025526567 hasConcept C33923547 @default.
- W3025526567 hasConcept C62520636 @default.
- W3025526567 hasConcept C82706917 @default.
- W3025526567 hasConceptScore W3025526567C114614502 @default.
- W3025526567 hasConceptScore W3025526567C121332964 @default.
- W3025526567 hasConceptScore W3025526567C171250308 @default.
- W3025526567 hasConceptScore W3025526567C184670325 @default.
- W3025526567 hasConceptScore W3025526567C19067145 @default.
- W3025526567 hasConceptScore W3025526567C192562407 @default.
- W3025526567 hasConceptScore W3025526567C22423302 @default.
- W3025526567 hasConceptScore W3025526567C33923547 @default.
- W3025526567 hasConceptScore W3025526567C62520636 @default.
- W3025526567 hasConceptScore W3025526567C82706917 @default.
- W3025526567 hasLocation W30255265671 @default.
- W3025526567 hasOpenAccess W3025526567 @default.
- W3025526567 hasPrimaryLocation W30255265671 @default.
- W3025526567 hasRelatedWork W1629790796 @default.
- W3025526567 hasRelatedWork W1964698437 @default.
- W3025526567 hasRelatedWork W1984103632 @default.
- W3025526567 hasRelatedWork W1988162727 @default.
- W3025526567 hasRelatedWork W2023694728 @default.
- W3025526567 hasRelatedWork W2033673571 @default.
- W3025526567 hasRelatedWork W2056402873 @default.
- W3025526567 hasRelatedWork W2059418251 @default.
- W3025526567 hasRelatedWork W2059772128 @default.
- W3025526567 hasRelatedWork W2091886205 @default.
- W3025526567 hasRelatedWork W2111382870 @default.
- W3025526567 hasRelatedWork W2132948414 @default.
- W3025526567 hasRelatedWork W2133669765 @default.
- W3025526567 hasRelatedWork W2149425362 @default.
- W3025526567 hasRelatedWork W2156897274 @default.
- W3025526567 hasRelatedWork W2338013190 @default.
- W3025526567 hasRelatedWork W2339534986 @default.
- W3025526567 hasRelatedWork W2899534021 @default.
- W3025526567 hasRelatedWork W2110492750 @default.
- W3025526567 hasRelatedWork W2522928002 @default.
- W3025526567 isParatext "false" @default.
- W3025526567 isRetracted "false" @default.
- W3025526567 magId "3025526567" @default.
- W3025526567 workType "article" @default.