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- W3026177796 created "2020-05-29" @default.
- W3026177796 creator A5017816693 @default.
- W3026177796 creator A5051290699 @default.
- W3026177796 date "1990-01-01" @default.
- W3026177796 modified "2023-10-18" @default.
- W3026177796 title "Ti 박막으로 부터 급속 열처리에 의한 $TiSi_2$ 형성에 관한 연구 = A study on the formation of $TiSi_2$ from thin Ti film by rapid thermal process" @default.
- W3026177796 hasPublicationYear "1990" @default.
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