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- W3026759250 created "2020-05-29" @default.
- W3026759250 creator A5001422682 @default.
- W3026759250 creator A5022135816 @default.
- W3026759250 creator A5026403784 @default.
- W3026759250 creator A5052930987 @default.
- W3026759250 creator A5088269599 @default.
- W3026759250 date "2019-01-25" @default.
- W3026759250 modified "2023-09-26" @default.
- W3026759250 title "Effects of the Antenna Structure for Inductively Coupled Plasma to Etch Rate Uniformity" @default.
- W3026759250 hasPublicationYear "2019" @default.
- W3026759250 type Work @default.
- W3026759250 sameAs 3026759250 @default.
- W3026759250 citedByCount "0" @default.
- W3026759250 crossrefType "journal-article" @default.
- W3026759250 hasAuthorship W3026759250A5001422682 @default.
- W3026759250 hasAuthorship W3026759250A5022135816 @default.
- W3026759250 hasAuthorship W3026759250A5026403784 @default.
- W3026759250 hasAuthorship W3026759250A5052930987 @default.
- W3026759250 hasAuthorship W3026759250A5088269599 @default.
- W3026759250 hasConcept C113196181 @default.
- W3026759250 hasConcept C119599485 @default.
- W3026759250 hasConcept C121332964 @default.
- W3026759250 hasConcept C127413603 @default.
- W3026759250 hasConcept C185544564 @default.
- W3026759250 hasConcept C185592680 @default.
- W3026759250 hasConcept C192562407 @default.
- W3026759250 hasConcept C21822782 @default.
- W3026759250 hasConcept C43617362 @default.
- W3026759250 hasConcept C49040817 @default.
- W3026759250 hasConcept C82706917 @default.
- W3026759250 hasConcept C95974651 @default.
- W3026759250 hasConceptScore W3026759250C113196181 @default.
- W3026759250 hasConceptScore W3026759250C119599485 @default.
- W3026759250 hasConceptScore W3026759250C121332964 @default.
- W3026759250 hasConceptScore W3026759250C127413603 @default.
- W3026759250 hasConceptScore W3026759250C185544564 @default.
- W3026759250 hasConceptScore W3026759250C185592680 @default.
- W3026759250 hasConceptScore W3026759250C192562407 @default.
- W3026759250 hasConceptScore W3026759250C21822782 @default.
- W3026759250 hasConceptScore W3026759250C43617362 @default.
- W3026759250 hasConceptScore W3026759250C49040817 @default.
- W3026759250 hasConceptScore W3026759250C82706917 @default.
- W3026759250 hasConceptScore W3026759250C95974651 @default.
- W3026759250 hasLocation W30267592501 @default.
- W3026759250 hasOpenAccess W3026759250 @default.
- W3026759250 hasPrimaryLocation W30267592501 @default.
- W3026759250 hasRelatedWork W1628224677 @default.
- W3026759250 hasRelatedWork W1991837747 @default.
- W3026759250 hasRelatedWork W2035727061 @default.
- W3026759250 hasRelatedWork W2130125558 @default.
- W3026759250 hasRelatedWork W2133669765 @default.
- W3026759250 hasRelatedWork W252550347 @default.
- W3026759250 hasRelatedWork W2765055964 @default.
- W3026759250 hasRelatedWork W2794246975 @default.
- W3026759250 hasRelatedWork W3016402758 @default.
- W3026759250 hasRelatedWork W3027121848 @default.
- W3026759250 hasRelatedWork W3164526334 @default.
- W3026759250 hasRelatedWork W2577025128 @default.
- W3026759250 hasRelatedWork W2738154103 @default.
- W3026759250 hasRelatedWork W2760720767 @default.
- W3026759250 hasRelatedWork W2841746952 @default.
- W3026759250 hasRelatedWork W2842117780 @default.
- W3026759250 hasRelatedWork W2844350888 @default.
- W3026759250 hasRelatedWork W2940518826 @default.
- W3026759250 hasRelatedWork W3109746219 @default.
- W3026759250 hasRelatedWork W3141057415 @default.
- W3026759250 isParatext "false" @default.
- W3026759250 isRetracted "false" @default.
- W3026759250 magId "3026759250" @default.
- W3026759250 workType "article" @default.