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- W3028988597 created "2020-06-05" @default.
- W3028988597 creator A5005693004 @default.
- W3028988597 creator A5009361490 @default.
- W3028988597 creator A5036116479 @default.
- W3028988597 creator A5047497073 @default.
- W3028988597 creator A5063351404 @default.
- W3028988597 creator A5085211795 @default.
- W3028988597 creator A5088488747 @default.
- W3028988597 creator A5089947292 @default.
- W3028988597 date "1996-10-01" @default.
- W3028988597 modified "2023-09-26" @default.
- W3028988597 title "Development and Optimization of the Decoupled Plasma Source for Metal Etch Using Wafer-based Probes" @default.
- W3028988597 hasPublicationYear "1996" @default.
- W3028988597 type Work @default.
- W3028988597 sameAs 3028988597 @default.
- W3028988597 citedByCount "0" @default.
- W3028988597 crossrefType "journal-article" @default.
- W3028988597 hasAuthorship W3028988597A5005693004 @default.
- W3028988597 hasAuthorship W3028988597A5009361490 @default.
- W3028988597 hasAuthorship W3028988597A5036116479 @default.
- W3028988597 hasAuthorship W3028988597A5047497073 @default.
- W3028988597 hasAuthorship W3028988597A5063351404 @default.
- W3028988597 hasAuthorship W3028988597A5085211795 @default.
- W3028988597 hasAuthorship W3028988597A5088488747 @default.
- W3028988597 hasAuthorship W3028988597A5089947292 @default.
- W3028988597 hasConcept C121332964 @default.
- W3028988597 hasConcept C160671074 @default.
- W3028988597 hasConcept C192562407 @default.
- W3028988597 hasConcept C41008148 @default.
- W3028988597 hasConcept C49040817 @default.
- W3028988597 hasConcept C62520636 @default.
- W3028988597 hasConcept C82706917 @default.
- W3028988597 hasConceptScore W3028988597C121332964 @default.
- W3028988597 hasConceptScore W3028988597C160671074 @default.
- W3028988597 hasConceptScore W3028988597C192562407 @default.
- W3028988597 hasConceptScore W3028988597C41008148 @default.
- W3028988597 hasConceptScore W3028988597C49040817 @default.
- W3028988597 hasConceptScore W3028988597C62520636 @default.
- W3028988597 hasConceptScore W3028988597C82706917 @default.
- W3028988597 hasLocation W30289885971 @default.
- W3028988597 hasOpenAccess W3028988597 @default.
- W3028988597 hasPrimaryLocation W30289885971 @default.
- W3028988597 hasRelatedWork W1554772128 @default.
- W3028988597 hasRelatedWork W1563240669 @default.
- W3028988597 hasRelatedWork W1895858127 @default.
- W3028988597 hasRelatedWork W1980395122 @default.
- W3028988597 hasRelatedWork W1980834751 @default.
- W3028988597 hasRelatedWork W2018742057 @default.
- W3028988597 hasRelatedWork W2023708320 @default.
- W3028988597 hasRelatedWork W2049692931 @default.
- W3028988597 hasRelatedWork W2093466312 @default.
- W3028988597 hasRelatedWork W2096432614 @default.
- W3028988597 hasRelatedWork W2099191215 @default.
- W3028988597 hasRelatedWork W2109739407 @default.
- W3028988597 hasRelatedWork W2131167615 @default.
- W3028988597 hasRelatedWork W2543121554 @default.
- W3028988597 hasRelatedWork W2980488479 @default.
- W3028988597 hasRelatedWork W839635801 @default.
- W3028988597 hasRelatedWork W2265192654 @default.
- W3028988597 hasRelatedWork W2266410260 @default.
- W3028988597 hasRelatedWork W2434631587 @default.
- W3028988597 hasRelatedWork W3129583098 @default.
- W3028988597 isParatext "false" @default.
- W3028988597 isRetracted "false" @default.
- W3028988597 magId "3028988597" @default.
- W3028988597 workType "article" @default.