Matches in SemOpenAlex for { <https://semopenalex.org/work/W3032066449> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W3032066449 created "2020-06-05" @default.
- W3032066449 creator A5012562004 @default.
- W3032066449 creator A5051208359 @default.
- W3032066449 creator A5058641651 @default.
- W3032066449 creator A5072170640 @default.
- W3032066449 creator A5084026079 @default.
- W3032066449 date "1994-01-01" @default.
- W3032066449 modified "2023-09-23" @default.
- W3032066449 title "Comparison of amorphous and polycrystalline tungsten nitride diffusion barrier for MOCVD-Cu metallization." @default.
- W3032066449 hasPublicationYear "1994" @default.
- W3032066449 type Work @default.
- W3032066449 sameAs 3032066449 @default.
- W3032066449 citedByCount "0" @default.
- W3032066449 crossrefType "journal-article" @default.
- W3032066449 hasAuthorship W3032066449A5012562004 @default.
- W3032066449 hasAuthorship W3032066449A5051208359 @default.
- W3032066449 hasAuthorship W3032066449A5058641651 @default.
- W3032066449 hasAuthorship W3032066449A5072170640 @default.
- W3032066449 hasAuthorship W3032066449A5084026079 @default.
- W3032066449 hasConcept C110738630 @default.
- W3032066449 hasConcept C121332964 @default.
- W3032066449 hasConcept C137637335 @default.
- W3032066449 hasConcept C159985019 @default.
- W3032066449 hasConcept C175665537 @default.
- W3032066449 hasConcept C185592680 @default.
- W3032066449 hasConcept C191897082 @default.
- W3032066449 hasConcept C192562407 @default.
- W3032066449 hasConcept C194760766 @default.
- W3032066449 hasConcept C2778836790 @default.
- W3032066449 hasConcept C2779227376 @default.
- W3032066449 hasConcept C2779833192 @default.
- W3032066449 hasConcept C542268612 @default.
- W3032066449 hasConcept C56052488 @default.
- W3032066449 hasConcept C69357855 @default.
- W3032066449 hasConcept C8010536 @default.
- W3032066449 hasConcept C97355855 @default.
- W3032066449 hasConceptScore W3032066449C110738630 @default.
- W3032066449 hasConceptScore W3032066449C121332964 @default.
- W3032066449 hasConceptScore W3032066449C137637335 @default.
- W3032066449 hasConceptScore W3032066449C159985019 @default.
- W3032066449 hasConceptScore W3032066449C175665537 @default.
- W3032066449 hasConceptScore W3032066449C185592680 @default.
- W3032066449 hasConceptScore W3032066449C191897082 @default.
- W3032066449 hasConceptScore W3032066449C192562407 @default.
- W3032066449 hasConceptScore W3032066449C194760766 @default.
- W3032066449 hasConceptScore W3032066449C2778836790 @default.
- W3032066449 hasConceptScore W3032066449C2779227376 @default.
- W3032066449 hasConceptScore W3032066449C2779833192 @default.
- W3032066449 hasConceptScore W3032066449C542268612 @default.
- W3032066449 hasConceptScore W3032066449C56052488 @default.
- W3032066449 hasConceptScore W3032066449C69357855 @default.
- W3032066449 hasConceptScore W3032066449C8010536 @default.
- W3032066449 hasConceptScore W3032066449C97355855 @default.
- W3032066449 hasLocation W30320664491 @default.
- W3032066449 hasOpenAccess W3032066449 @default.
- W3032066449 hasPrimaryLocation W30320664491 @default.
- W3032066449 hasRelatedWork W1552457903 @default.
- W3032066449 hasRelatedWork W2006329922 @default.
- W3032066449 hasRelatedWork W2012258843 @default.
- W3032066449 hasRelatedWork W2024881978 @default.
- W3032066449 hasRelatedWork W2029648606 @default.
- W3032066449 hasRelatedWork W2062158478 @default.
- W3032066449 hasRelatedWork W2125592904 @default.
- W3032066449 hasRelatedWork W2334065889 @default.
- W3032066449 hasRelatedWork W2764602009 @default.
- W3032066449 hasRelatedWork W2955442171 @default.
- W3032066449 hasRelatedWork W2971982639 @default.
- W3032066449 hasRelatedWork W2980319200 @default.
- W3032066449 hasRelatedWork W2991919104 @default.
- W3032066449 hasRelatedWork W3029859522 @default.
- W3032066449 hasRelatedWork W3032262949 @default.
- W3032066449 hasRelatedWork W3139951986 @default.
- W3032066449 hasRelatedWork W643542034 @default.
- W3032066449 hasRelatedWork W1940224136 @default.
- W3032066449 hasRelatedWork W2342740117 @default.
- W3032066449 hasRelatedWork W2911004476 @default.
- W3032066449 isParatext "false" @default.
- W3032066449 isRetracted "false" @default.
- W3032066449 magId "3032066449" @default.
- W3032066449 workType "article" @default.