Matches in SemOpenAlex for { <https://semopenalex.org/work/W3035024706> ?p ?o ?g. }
Showing items 1 to 43 of
43
with 100 items per page.
- W3035024706 endingPage "36" @default.
- W3035024706 startingPage "29" @default.
- W3035024706 created "2020-06-19" @default.
- W3035024706 creator A5075010687 @default.
- W3035024706 creator A5082422094 @default.
- W3035024706 date "2020-05-31" @default.
- W3035024706 modified "2023-10-18" @default.
- W3035024706 title "A Study on the Bottom Impedance Tuning Circuit of PE-CVD Chamber" @default.
- W3035024706 doi "https://doi.org/10.5573/ieie.2020.57.5.29" @default.
- W3035024706 hasPublicationYear "2020" @default.
- W3035024706 type Work @default.
- W3035024706 sameAs 3035024706 @default.
- W3035024706 citedByCount "0" @default.
- W3035024706 crossrefType "journal-article" @default.
- W3035024706 hasAuthorship W3035024706A5075010687 @default.
- W3035024706 hasAuthorship W3035024706A5082422094 @default.
- W3035024706 hasConcept C119599485 @default.
- W3035024706 hasConcept C127413603 @default.
- W3035024706 hasConcept C17829176 @default.
- W3035024706 hasConcept C192562407 @default.
- W3035024706 hasConceptScore W3035024706C119599485 @default.
- W3035024706 hasConceptScore W3035024706C127413603 @default.
- W3035024706 hasConceptScore W3035024706C17829176 @default.
- W3035024706 hasConceptScore W3035024706C192562407 @default.
- W3035024706 hasIssue "5" @default.
- W3035024706 hasLocation W30350247061 @default.
- W3035024706 hasOpenAccess W3035024706 @default.
- W3035024706 hasPrimaryLocation W30350247061 @default.
- W3035024706 hasRelatedWork W11160646 @default.
- W3035024706 hasRelatedWork W11943993 @default.
- W3035024706 hasRelatedWork W12517141 @default.
- W3035024706 hasRelatedWork W13514592 @default.
- W3035024706 hasRelatedWork W14143508 @default.
- W3035024706 hasRelatedWork W29389439 @default.
- W3035024706 hasRelatedWork W37696464 @default.
- W3035024706 hasRelatedWork W38206781 @default.
- W3035024706 hasRelatedWork W53225968 @default.
- W3035024706 hasRelatedWork W735553 @default.
- W3035024706 hasVolume "57" @default.
- W3035024706 isParatext "false" @default.
- W3035024706 isRetracted "false" @default.
- W3035024706 magId "3035024706" @default.
- W3035024706 workType "article" @default.