Matches in SemOpenAlex for { <https://semopenalex.org/work/W3048321674> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W3048321674 created "2020-08-13" @default.
- W3048321674 creator A5025313958 @default.
- W3048321674 creator A5058033920 @default.
- W3048321674 creator A5078728875 @default.
- W3048321674 date "2001-10-01" @default.
- W3048321674 modified "2023-09-28" @default.
- W3048321674 title "Plasma Etch Endpoint and Fault Detection Along with UV-Vis Absorption Spectroscopy from a Single Compact Solid State Detector." @default.
- W3048321674 hasPublicationYear "2001" @default.
- W3048321674 type Work @default.
- W3048321674 sameAs 3048321674 @default.
- W3048321674 citedByCount "0" @default.
- W3048321674 crossrefType "journal-article" @default.
- W3048321674 hasAuthorship W3048321674A5025313958 @default.
- W3048321674 hasAuthorship W3048321674A5058033920 @default.
- W3048321674 hasAuthorship W3048321674A5078728875 @default.
- W3048321674 hasConcept C107814960 @default.
- W3048321674 hasConcept C113196181 @default.
- W3048321674 hasConcept C119599485 @default.
- W3048321674 hasConcept C119824511 @default.
- W3048321674 hasConcept C120665830 @default.
- W3048321674 hasConcept C121332964 @default.
- W3048321674 hasConcept C125287762 @default.
- W3048321674 hasConcept C127413603 @default.
- W3048321674 hasConcept C152745839 @default.
- W3048321674 hasConcept C159985019 @default.
- W3048321674 hasConcept C172707124 @default.
- W3048321674 hasConcept C185592680 @default.
- W3048321674 hasConcept C192562407 @default.
- W3048321674 hasConcept C32891209 @default.
- W3048321674 hasConcept C43617362 @default.
- W3048321674 hasConcept C49040817 @default.
- W3048321674 hasConcept C61696701 @default.
- W3048321674 hasConcept C62520636 @default.
- W3048321674 hasConcept C94915269 @default.
- W3048321674 hasConceptScore W3048321674C107814960 @default.
- W3048321674 hasConceptScore W3048321674C113196181 @default.
- W3048321674 hasConceptScore W3048321674C119599485 @default.
- W3048321674 hasConceptScore W3048321674C119824511 @default.
- W3048321674 hasConceptScore W3048321674C120665830 @default.
- W3048321674 hasConceptScore W3048321674C121332964 @default.
- W3048321674 hasConceptScore W3048321674C125287762 @default.
- W3048321674 hasConceptScore W3048321674C127413603 @default.
- W3048321674 hasConceptScore W3048321674C152745839 @default.
- W3048321674 hasConceptScore W3048321674C159985019 @default.
- W3048321674 hasConceptScore W3048321674C172707124 @default.
- W3048321674 hasConceptScore W3048321674C185592680 @default.
- W3048321674 hasConceptScore W3048321674C192562407 @default.
- W3048321674 hasConceptScore W3048321674C32891209 @default.
- W3048321674 hasConceptScore W3048321674C43617362 @default.
- W3048321674 hasConceptScore W3048321674C49040817 @default.
- W3048321674 hasConceptScore W3048321674C61696701 @default.
- W3048321674 hasConceptScore W3048321674C62520636 @default.
- W3048321674 hasConceptScore W3048321674C94915269 @default.
- W3048321674 hasLocation W30483216741 @default.
- W3048321674 hasOpenAccess W3048321674 @default.
- W3048321674 hasPrimaryLocation W30483216741 @default.
- W3048321674 hasRelatedWork W1972701397 @default.
- W3048321674 hasRelatedWork W1973034983 @default.
- W3048321674 hasRelatedWork W1973489599 @default.
- W3048321674 hasRelatedWork W1982314640 @default.
- W3048321674 hasRelatedWork W1988420629 @default.
- W3048321674 hasRelatedWork W1992564304 @default.
- W3048321674 hasRelatedWork W2004193731 @default.
- W3048321674 hasRelatedWork W2024729267 @default.
- W3048321674 hasRelatedWork W2050212135 @default.
- W3048321674 hasRelatedWork W2070028549 @default.
- W3048321674 hasRelatedWork W2077374023 @default.
- W3048321674 hasRelatedWork W2115614247 @default.
- W3048321674 hasRelatedWork W2161080164 @default.
- W3048321674 hasRelatedWork W2599681385 @default.
- W3048321674 hasRelatedWork W2907571669 @default.
- W3048321674 hasRelatedWork W2950742168 @default.
- W3048321674 hasRelatedWork W3144475077 @default.
- W3048321674 hasRelatedWork W789851664 @default.
- W3048321674 hasRelatedWork W2853964551 @default.
- W3048321674 hasRelatedWork W3095450172 @default.
- W3048321674 isParatext "false" @default.
- W3048321674 isRetracted "false" @default.
- W3048321674 magId "3048321674" @default.
- W3048321674 workType "article" @default.