Matches in SemOpenAlex for { <https://semopenalex.org/work/W3048642762> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W3048642762 endingPage "5" @default.
- W3048642762 startingPage "2" @default.
- W3048642762 created "2020-08-18" @default.
- W3048642762 creator A5015644474 @default.
- W3048642762 creator A5023544022 @default.
- W3048642762 creator A5066702855 @default.
- W3048642762 creator A5067914826 @default.
- W3048642762 date "1993-01-01" @default.
- W3048642762 modified "2023-09-24" @default.
- W3048642762 title "Critical analysis by way of hole etching with a manufacturable RIE process using SiCl4 and BCl3 and Cl2 chemistries" @default.
- W3048642762 hasPublicationYear "1993" @default.
- W3048642762 type Work @default.
- W3048642762 sameAs 3048642762 @default.
- W3048642762 citedByCount "0" @default.
- W3048642762 crossrefType "journal-article" @default.
- W3048642762 hasAuthorship W3048642762A5015644474 @default.
- W3048642762 hasAuthorship W3048642762A5023544022 @default.
- W3048642762 hasAuthorship W3048642762A5066702855 @default.
- W3048642762 hasAuthorship W3048642762A5067914826 @default.
- W3048642762 hasConcept C100460472 @default.
- W3048642762 hasConcept C127413603 @default.
- W3048642762 hasConcept C171250308 @default.
- W3048642762 hasConcept C192562407 @default.
- W3048642762 hasConcept C199360897 @default.
- W3048642762 hasConcept C21880701 @default.
- W3048642762 hasConcept C2779227376 @default.
- W3048642762 hasConcept C41008148 @default.
- W3048642762 hasConcept C98045186 @default.
- W3048642762 hasConceptScore W3048642762C100460472 @default.
- W3048642762 hasConceptScore W3048642762C127413603 @default.
- W3048642762 hasConceptScore W3048642762C171250308 @default.
- W3048642762 hasConceptScore W3048642762C192562407 @default.
- W3048642762 hasConceptScore W3048642762C199360897 @default.
- W3048642762 hasConceptScore W3048642762C21880701 @default.
- W3048642762 hasConceptScore W3048642762C2779227376 @default.
- W3048642762 hasConceptScore W3048642762C41008148 @default.
- W3048642762 hasConceptScore W3048642762C98045186 @default.
- W3048642762 hasLocation W30486427621 @default.
- W3048642762 hasOpenAccess W3048642762 @default.
- W3048642762 hasPrimaryLocation W30486427621 @default.
- W3048642762 hasRelatedWork W1967034023 @default.
- W3048642762 hasRelatedWork W1968129678 @default.
- W3048642762 hasRelatedWork W1971517322 @default.
- W3048642762 hasRelatedWork W1988349809 @default.
- W3048642762 hasRelatedWork W2033687472 @default.
- W3048642762 hasRelatedWork W2034180219 @default.
- W3048642762 hasRelatedWork W2074502480 @default.
- W3048642762 hasRelatedWork W2128224336 @default.
- W3048642762 hasRelatedWork W2155424294 @default.
- W3048642762 hasRelatedWork W2600957157 @default.
- W3048642762 hasRelatedWork W2790910101 @default.
- W3048642762 hasRelatedWork W2896928739 @default.
- W3048642762 hasRelatedWork W3010472938 @default.
- W3048642762 hasRelatedWork W1483687129 @default.
- W3048642762 hasRelatedWork W2039155714 @default.
- W3048642762 hasRelatedWork W2257997034 @default.
- W3048642762 hasRelatedWork W2400046341 @default.
- W3048642762 hasRelatedWork W2605767648 @default.
- W3048642762 hasRelatedWork W2893883112 @default.
- W3048642762 hasRelatedWork W3144903199 @default.
- W3048642762 isParatext "false" @default.
- W3048642762 isRetracted "false" @default.
- W3048642762 magId "3048642762" @default.
- W3048642762 workType "article" @default.