Matches in SemOpenAlex for { <https://semopenalex.org/work/W3085664868> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W3085664868 startingPage "24" @default.
- W3085664868 created "2020-09-21" @default.
- W3085664868 creator A5077530805 @default.
- W3085664868 date "1992-12-01" @default.
- W3085664868 modified "2023-09-24" @default.
- W3085664868 title "Silicon micromachining applied to the management of the thermal environment in wafer scale integration technology" @default.
- W3085664868 hasPublicationYear "1992" @default.
- W3085664868 type Work @default.
- W3085664868 sameAs 3085664868 @default.
- W3085664868 citedByCount "1" @default.
- W3085664868 crossrefType "journal-article" @default.
- W3085664868 hasAuthorship W3085664868A5077530805 @default.
- W3085664868 hasConcept C114834414 @default.
- W3085664868 hasConcept C127413603 @default.
- W3085664868 hasConcept C136525101 @default.
- W3085664868 hasConcept C142724271 @default.
- W3085664868 hasConcept C145667562 @default.
- W3085664868 hasConcept C153294291 @default.
- W3085664868 hasConcept C160671074 @default.
- W3085664868 hasConcept C192562407 @default.
- W3085664868 hasConcept C204530211 @default.
- W3085664868 hasConcept C204787440 @default.
- W3085664868 hasConcept C205649164 @default.
- W3085664868 hasConcept C2778638305 @default.
- W3085664868 hasConcept C2778755073 @default.
- W3085664868 hasConcept C49040817 @default.
- W3085664868 hasConcept C58640448 @default.
- W3085664868 hasConcept C71924100 @default.
- W3085664868 hasConcept C78519656 @default.
- W3085664868 hasConceptScore W3085664868C114834414 @default.
- W3085664868 hasConceptScore W3085664868C127413603 @default.
- W3085664868 hasConceptScore W3085664868C136525101 @default.
- W3085664868 hasConceptScore W3085664868C142724271 @default.
- W3085664868 hasConceptScore W3085664868C145667562 @default.
- W3085664868 hasConceptScore W3085664868C153294291 @default.
- W3085664868 hasConceptScore W3085664868C160671074 @default.
- W3085664868 hasConceptScore W3085664868C192562407 @default.
- W3085664868 hasConceptScore W3085664868C204530211 @default.
- W3085664868 hasConceptScore W3085664868C204787440 @default.
- W3085664868 hasConceptScore W3085664868C205649164 @default.
- W3085664868 hasConceptScore W3085664868C2778638305 @default.
- W3085664868 hasConceptScore W3085664868C2778755073 @default.
- W3085664868 hasConceptScore W3085664868C49040817 @default.
- W3085664868 hasConceptScore W3085664868C58640448 @default.
- W3085664868 hasConceptScore W3085664868C71924100 @default.
- W3085664868 hasConceptScore W3085664868C78519656 @default.
- W3085664868 hasLocation W30856648681 @default.
- W3085664868 hasOpenAccess W3085664868 @default.
- W3085664868 hasPrimaryLocation W30856648681 @default.
- W3085664868 hasRelatedWork W1595643886 @default.
- W3085664868 hasRelatedWork W1677053687 @default.
- W3085664868 hasRelatedWork W1903530974 @default.
- W3085664868 hasRelatedWork W1972848894 @default.
- W3085664868 hasRelatedWork W2002445684 @default.
- W3085664868 hasRelatedWork W2037984775 @default.
- W3085664868 hasRelatedWork W2100173895 @default.
- W3085664868 hasRelatedWork W2110504571 @default.
- W3085664868 hasRelatedWork W2116193184 @default.
- W3085664868 hasRelatedWork W2121603267 @default.
- W3085664868 hasRelatedWork W2134112003 @default.
- W3085664868 hasRelatedWork W2149881015 @default.
- W3085664868 hasRelatedWork W2152304860 @default.
- W3085664868 hasRelatedWork W2154971486 @default.
- W3085664868 hasRelatedWork W2165912987 @default.
- W3085664868 hasRelatedWork W2168306017 @default.
- W3085664868 hasRelatedWork W2169258629 @default.
- W3085664868 hasRelatedWork W2289906255 @default.
- W3085664868 hasRelatedWork W2325169854 @default.
- W3085664868 hasRelatedWork W2106486561 @default.
- W3085664868 isParatext "false" @default.
- W3085664868 isRetracted "false" @default.
- W3085664868 magId "3085664868" @default.
- W3085664868 workType "article" @default.