Matches in SemOpenAlex for { <https://semopenalex.org/work/W3108684889> ?p ?o ?g. }
Showing items 1 to 56 of
56
with 100 items per page.
- W3108684889 created "2020-12-07" @default.
- W3108684889 creator A5071121005 @default.
- W3108684889 date "2020-07-22" @default.
- W3108684889 modified "2023-09-27" @default.
- W3108684889 title "Deep Reactive-Ion Etching Process Development and Mask Selection" @default.
- W3108684889 hasPublicationYear "2020" @default.
- W3108684889 type Work @default.
- W3108684889 sameAs 3108684889 @default.
- W3108684889 citedByCount "0" @default.
- W3108684889 crossrefType "journal-article" @default.
- W3108684889 hasAuthorship W3108684889A5071121005 @default.
- W3108684889 hasConcept C100460472 @default.
- W3108684889 hasConcept C111919701 @default.
- W3108684889 hasConcept C154945302 @default.
- W3108684889 hasConcept C171250308 @default.
- W3108684889 hasConcept C192562407 @default.
- W3108684889 hasConcept C2779227376 @default.
- W3108684889 hasConcept C41008148 @default.
- W3108684889 hasConcept C81917197 @default.
- W3108684889 hasConcept C98045186 @default.
- W3108684889 hasConceptScore W3108684889C100460472 @default.
- W3108684889 hasConceptScore W3108684889C111919701 @default.
- W3108684889 hasConceptScore W3108684889C154945302 @default.
- W3108684889 hasConceptScore W3108684889C171250308 @default.
- W3108684889 hasConceptScore W3108684889C192562407 @default.
- W3108684889 hasConceptScore W3108684889C2779227376 @default.
- W3108684889 hasConceptScore W3108684889C41008148 @default.
- W3108684889 hasConceptScore W3108684889C81917197 @default.
- W3108684889 hasConceptScore W3108684889C98045186 @default.
- W3108684889 hasLocation W31086848891 @default.
- W3108684889 hasOpenAccess W3108684889 @default.
- W3108684889 hasPrimaryLocation W31086848891 @default.
- W3108684889 hasRelatedWork W1504164758 @default.
- W3108684889 hasRelatedWork W2069970537 @default.
- W3108684889 hasRelatedWork W2117305598 @default.
- W3108684889 hasRelatedWork W2164353131 @default.
- W3108684889 hasRelatedWork W2310497839 @default.
- W3108684889 hasRelatedWork W2360631777 @default.
- W3108684889 hasRelatedWork W2362770635 @default.
- W3108684889 hasRelatedWork W2386361441 @default.
- W3108684889 hasRelatedWork W2774293706 @default.
- W3108684889 hasRelatedWork W2990622264 @default.
- W3108684889 hasRelatedWork W3022667259 @default.
- W3108684889 hasRelatedWork W3134603934 @default.
- W3108684889 hasRelatedWork W2257137446 @default.
- W3108684889 hasRelatedWork W2567257145 @default.
- W3108684889 hasRelatedWork W2735121268 @default.
- W3108684889 hasRelatedWork W2837312069 @default.
- W3108684889 hasRelatedWork W2845174141 @default.
- W3108684889 hasRelatedWork W2940402959 @default.
- W3108684889 hasRelatedWork W3107314507 @default.
- W3108684889 hasRelatedWork W3141342292 @default.
- W3108684889 isParatext "false" @default.
- W3108684889 isRetracted "false" @default.
- W3108684889 magId "3108684889" @default.
- W3108684889 workType "article" @default.