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Matches in SemOpenAlex for { <https://semopenalex.org/work/W3118197919> ?p ?o ?g. }

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• W3118197919 date "2021-01-23" @default.
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• W3118197919 title "Stress control in thick AlN/<i>c-</i>Al₂O₃ templates grown by plasma-assisted molecular beam epitaxy" @default.
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• W3118197919 doi "https://doi.org/10.1088/1361-6641/abd63d" @default.
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