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- W3133200153 created "2021-03-01" @default.
- W3133200153 creator A5012589594 @default.
- W3133200153 date "2014-01-01" @default.
- W3133200153 modified "2023-09-28" @default.
- W3133200153 title "Silicon-rim-reinforced Silicon Nitride Micro-scanner and Wafer-level Vacuum Packaging" @default.
- W3133200153 hasPublicationYear "2014" @default.
- W3133200153 type Work @default.
- W3133200153 sameAs 3133200153 @default.
- W3133200153 citedByCount "0" @default.
- W3133200153 crossrefType "dissertation" @default.
- W3133200153 hasAuthorship W3133200153A5012589594 @default.
- W3133200153 hasConcept C100155856 @default.
- W3133200153 hasConcept C119599485 @default.
- W3133200153 hasConcept C127413603 @default.
- W3133200153 hasConcept C139159486 @default.
- W3133200153 hasConcept C160671074 @default.
- W3133200153 hasConcept C171250308 @default.
- W3133200153 hasConcept C192562407 @default.
- W3133200153 hasConcept C194760766 @default.
- W3133200153 hasConcept C2777431650 @default.
- W3133200153 hasConcept C2779227376 @default.
- W3133200153 hasConcept C2779751349 @default.
- W3133200153 hasConcept C49040817 @default.
- W3133200153 hasConcept C544956773 @default.
- W3133200153 hasConcept C61696701 @default.
- W3133200153 hasConcept C78519656 @default.
- W3133200153 hasConceptScore W3133200153C100155856 @default.
- W3133200153 hasConceptScore W3133200153C119599485 @default.
- W3133200153 hasConceptScore W3133200153C127413603 @default.
- W3133200153 hasConceptScore W3133200153C139159486 @default.
- W3133200153 hasConceptScore W3133200153C160671074 @default.
- W3133200153 hasConceptScore W3133200153C171250308 @default.
- W3133200153 hasConceptScore W3133200153C192562407 @default.
- W3133200153 hasConceptScore W3133200153C194760766 @default.
- W3133200153 hasConceptScore W3133200153C2777431650 @default.
- W3133200153 hasConceptScore W3133200153C2779227376 @default.
- W3133200153 hasConceptScore W3133200153C2779751349 @default.
- W3133200153 hasConceptScore W3133200153C49040817 @default.
- W3133200153 hasConceptScore W3133200153C544956773 @default.
- W3133200153 hasConceptScore W3133200153C61696701 @default.
- W3133200153 hasConceptScore W3133200153C78519656 @default.
- W3133200153 hasLocation W31332001531 @default.
- W3133200153 hasOpenAccess W3133200153 @default.
- W3133200153 hasPrimaryLocation W31332001531 @default.
- W3133200153 hasRelatedWork W1511597299 @default.
- W3133200153 hasRelatedWork W1965547232 @default.
- W3133200153 hasRelatedWork W2134346907 @default.
- W3133200153 hasRelatedWork W2136732512 @default.
- W3133200153 hasRelatedWork W2149881015 @default.
- W3133200153 hasRelatedWork W2806750102 @default.
- W3133200153 hasRelatedWork W2970432583 @default.
- W3133200153 hasRelatedWork W3026394616 @default.
- W3133200153 hasRelatedWork W3138172448 @default.
- W3133200153 hasRelatedWork W3154138822 @default.
- W3133200153 hasRelatedWork W2410007307 @default.
- W3133200153 hasRelatedWork W2584013961 @default.
- W3133200153 hasRelatedWork W2754764646 @default.
- W3133200153 hasRelatedWork W2827446936 @default.
- W3133200153 hasRelatedWork W2844526257 @default.
- W3133200153 hasRelatedWork W2859168769 @default.
- W3133200153 hasRelatedWork W2877158424 @default.
- W3133200153 hasRelatedWork W2960239205 @default.
- W3133200153 hasRelatedWork W3110082049 @default.
- W3133200153 hasRelatedWork W3172697406 @default.
- W3133200153 isParatext "false" @default.
- W3133200153 isRetracted "false" @default.
- W3133200153 magId "3133200153" @default.
- W3133200153 workType "dissertation" @default.