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- W3136332510 endingPage "866" @default.
- W3136332510 startingPage "861" @default.
- W3136332510 created "2021-03-29" @default.
- W3136332510 creator A5057651898 @default.
- W3136332510 creator A5064245670 @default.
- W3136332510 creator A5067729347 @default.
- W3136332510 creator A5076379275 @default.
- W3136332510 date "1993-01-01" @default.
- W3136332510 modified "2023-09-28" @default.
- W3136332510 title "Assessment of ECR argon plasma etching damage on Si and SiO2 interfaces" @default.
- W3136332510 hasPublicationYear "1993" @default.
- W3136332510 type Work @default.
- W3136332510 sameAs 3136332510 @default.
- W3136332510 citedByCount "0" @default.
- W3136332510 crossrefType "journal-article" @default.
- W3136332510 hasAuthorship W3136332510A5057651898 @default.
- W3136332510 hasAuthorship W3136332510A5064245670 @default.
- W3136332510 hasAuthorship W3136332510A5067729347 @default.
- W3136332510 hasAuthorship W3136332510A5076379275 @default.
- W3136332510 hasConcept C100460472 @default.
- W3136332510 hasConcept C107187091 @default.
- W3136332510 hasConcept C121332964 @default.
- W3136332510 hasConcept C159985019 @default.
- W3136332510 hasConcept C178790620 @default.
- W3136332510 hasConcept C185544564 @default.
- W3136332510 hasConcept C185592680 @default.
- W3136332510 hasConcept C191897082 @default.
- W3136332510 hasConcept C192562407 @default.
- W3136332510 hasConcept C2779227376 @default.
- W3136332510 hasConcept C547737533 @default.
- W3136332510 hasConcept C60581705 @default.
- W3136332510 hasConcept C82706917 @default.
- W3136332510 hasConceptScore W3136332510C100460472 @default.
- W3136332510 hasConceptScore W3136332510C107187091 @default.
- W3136332510 hasConceptScore W3136332510C121332964 @default.
- W3136332510 hasConceptScore W3136332510C159985019 @default.
- W3136332510 hasConceptScore W3136332510C178790620 @default.
- W3136332510 hasConceptScore W3136332510C185544564 @default.
- W3136332510 hasConceptScore W3136332510C185592680 @default.
- W3136332510 hasConceptScore W3136332510C191897082 @default.
- W3136332510 hasConceptScore W3136332510C192562407 @default.
- W3136332510 hasConceptScore W3136332510C2779227376 @default.
- W3136332510 hasConceptScore W3136332510C547737533 @default.
- W3136332510 hasConceptScore W3136332510C60581705 @default.
- W3136332510 hasConceptScore W3136332510C82706917 @default.
- W3136332510 hasLocation W31363325101 @default.
- W3136332510 hasOpenAccess W3136332510 @default.
- W3136332510 hasPrimaryLocation W31363325101 @default.
- W3136332510 hasRelatedWork W118848176 @default.
- W3136332510 hasRelatedWork W1969707723 @default.
- W3136332510 hasRelatedWork W1970197434 @default.
- W3136332510 hasRelatedWork W1982460892 @default.
- W3136332510 hasRelatedWork W1987680690 @default.
- W3136332510 hasRelatedWork W1992164015 @default.
- W3136332510 hasRelatedWork W2002273145 @default.
- W3136332510 hasRelatedWork W2032552246 @default.
- W3136332510 hasRelatedWork W2067831186 @default.
- W3136332510 hasRelatedWork W2071041595 @default.
- W3136332510 hasRelatedWork W2086006844 @default.
- W3136332510 hasRelatedWork W2140486398 @default.
- W3136332510 hasRelatedWork W2322007799 @default.
- W3136332510 hasRelatedWork W2391111545 @default.
- W3136332510 hasRelatedWork W2720866005 @default.
- W3136332510 hasRelatedWork W2735514544 @default.
- W3136332510 hasRelatedWork W2948324391 @default.
- W3136332510 hasRelatedWork W414338065 @default.
- W3136332510 hasRelatedWork W431117103 @default.
- W3136332510 hasRelatedWork W578849451 @default.
- W3136332510 isParatext "false" @default.
- W3136332510 isRetracted "false" @default.
- W3136332510 magId "3136332510" @default.
- W3136332510 workType "article" @default.