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- W3136556820 created "2021-03-29" @default.
- W3136556820 creator A5018403675 @default.
- W3136556820 creator A5038392913 @default.
- W3136556820 creator A5058840767 @default.
- W3136556820 creator A5080012966 @default.
- W3136556820 creator A5089011806 @default.
- W3136556820 date "2020-10-20" @default.
- W3136556820 modified "2023-09-23" @default.
- W3136556820 title "Development of a dicing process for 4H-SiC wafers by Plasma Chemical Vaporization Machining (PCVM) using a metal slit mask" @default.
- W3136556820 hasPublicationYear "2020" @default.
- W3136556820 type Work @default.
- W3136556820 sameAs 3136556820 @default.
- W3136556820 citedByCount "0" @default.
- W3136556820 crossrefType "journal-article" @default.
- W3136556820 hasAuthorship W3136556820A5018403675 @default.
- W3136556820 hasAuthorship W3136556820A5038392913 @default.
- W3136556820 hasAuthorship W3136556820A5058840767 @default.
- W3136556820 hasAuthorship W3136556820A5080012966 @default.
- W3136556820 hasAuthorship W3136556820A5089011806 @default.
- W3136556820 hasConcept C121332964 @default.
- W3136556820 hasConcept C127413603 @default.
- W3136556820 hasConcept C140075996 @default.
- W3136556820 hasConcept C160671074 @default.
- W3136556820 hasConcept C165013422 @default.
- W3136556820 hasConcept C178790620 @default.
- W3136556820 hasConcept C185592680 @default.
- W3136556820 hasConcept C191897082 @default.
- W3136556820 hasConcept C192562407 @default.
- W3136556820 hasConcept C195801359 @default.
- W3136556820 hasConcept C199639397 @default.
- W3136556820 hasConcept C49040817 @default.
- W3136556820 hasConcept C523214423 @default.
- W3136556820 hasConcept C62520636 @default.
- W3136556820 hasConcept C82706917 @default.
- W3136556820 hasConceptScore W3136556820C121332964 @default.
- W3136556820 hasConceptScore W3136556820C127413603 @default.
- W3136556820 hasConceptScore W3136556820C140075996 @default.
- W3136556820 hasConceptScore W3136556820C160671074 @default.
- W3136556820 hasConceptScore W3136556820C165013422 @default.
- W3136556820 hasConceptScore W3136556820C178790620 @default.
- W3136556820 hasConceptScore W3136556820C185592680 @default.
- W3136556820 hasConceptScore W3136556820C191897082 @default.
- W3136556820 hasConceptScore W3136556820C192562407 @default.
- W3136556820 hasConceptScore W3136556820C195801359 @default.
- W3136556820 hasConceptScore W3136556820C199639397 @default.
- W3136556820 hasConceptScore W3136556820C49040817 @default.
- W3136556820 hasConceptScore W3136556820C523214423 @default.
- W3136556820 hasConceptScore W3136556820C62520636 @default.
- W3136556820 hasConceptScore W3136556820C82706917 @default.
- W3136556820 hasLocation W31365568201 @default.
- W3136556820 hasOpenAccess W3136556820 @default.
- W3136556820 hasPrimaryLocation W31365568201 @default.
- W3136556820 hasRelatedWork W1976708814 @default.
- W3136556820 hasRelatedWork W2164353131 @default.
- W3136556820 hasRelatedWork W3208000422 @default.
- W3136556820 hasRelatedWork W2173595468 @default.
- W3136556820 hasRelatedWork W2280623308 @default.
- W3136556820 hasRelatedWork W2291894645 @default.
- W3136556820 hasRelatedWork W2566217175 @default.
- W3136556820 hasRelatedWork W2596317579 @default.
- W3136556820 hasRelatedWork W2754376243 @default.
- W3136556820 hasRelatedWork W2816691091 @default.
- W3136556820 hasRelatedWork W2835535264 @default.
- W3136556820 hasRelatedWork W2854407627 @default.
- W3136556820 hasRelatedWork W2865260489 @default.
- W3136556820 hasRelatedWork W2881278523 @default.
- W3136556820 hasRelatedWork W2931996829 @default.
- W3136556820 hasRelatedWork W3101679958 @default.
- W3136556820 hasRelatedWork W3129490250 @default.
- W3136556820 hasRelatedWork W3137620688 @default.
- W3136556820 hasRelatedWork W3142957814 @default.
- W3136556820 hasRelatedWork W3143092602 @default.
- W3136556820 isParatext "false" @default.
- W3136556820 isRetracted "false" @default.
- W3136556820 magId "3136556820" @default.
- W3136556820 workType "article" @default.